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Global Shape Reconstruction of the Bended AFM Cantilever
Wei YJ(魏阳杰); Wu CD(吴成东); Dong ZL(董再励); Liu Z(刘柱)
作者部门机器人学研究室
关键词Atomic Force Microscope (Afm) Bended Cantilever Shape Reconstruction
发表期刊IEEE TRANSACTIONS ON NANOTECHNOLOGY
ISSN1536-125X
2012
卷号11期号:4页码:713-719
收录类别SCI ; EI
EI收录号20122915258138
WOS记录号WOS:000306184400011
产权排序1
资助机构Manuscript received February 20, 2011; revised September 18, 2011; accepted March 27, 2012. Date of publication April 5, 2012; date of current version July 11, 2012. This work was supported by the Chinese Academy of Sciences FEA International Partnership Program for creative research teams. The review of this paper was arranged by Associate Editor C. Zhou.
摘要Principle of atomic force microscope (AFM) is on the basis of cantilever's deflection. However, up to now, there are still no effective methods to model the cantilever's deflection with high precision, which will usually result in a poor measurement accuracy of AFM and has greatly limited further applications of AFM in more different fields. Thus, a global shape from defocus method, which is only based on a single vision sensor, is introduced in this paper to reconstruct the bended shape of AFM cantilever. First, the model of the defocus imaging is given using the concepts of relative blurring and diffusion equation. Second, the relationship between the relative blurring and the interested depth information is built with basic imaging formulas. Subsequently, the depth measurement problem is transformed into an optimization issue and an algorithm is designed to compute the deflection of cantilever. Finally, extensive experiments are conducted and results are analyzed to show the feasibility and the effectiveness of the proposed method.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]ATOMIC-FORCE MICROSCOPY ; CARBON NANOTUBES ; DEFOCUS
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/10025
专题机器人学研究室
通讯作者Wei YJ(魏阳杰)
作者单位1.State Key Laboratory of Robotics, Graduate School of Chinese Academy of Sciences, Chinese Academy of Sciences, Shenyang 110016, China
2.School of Information Science and Engineering, Northeast University, Shenyang 110004, China
3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式
GB/T 7714
Wei YJ,Wu CD,Dong ZL,et al. Global Shape Reconstruction of the Bended AFM Cantilever[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2012,11(4):713-719.
APA Wei YJ,Wu CD,Dong ZL,&Liu Z.(2012).Global Shape Reconstruction of the Bended AFM Cantilever.IEEE TRANSACTIONS ON NANOTECHNOLOGY,11(4),713-719.
MLA Wei YJ,et al."Global Shape Reconstruction of the Bended AFM Cantilever".IEEE TRANSACTIONS ON NANOTECHNOLOGY 11.4(2012):713-719.
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