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Global Shape Reconstruction of the Bended AFM Cantilever
Wei YJ(魏阳杰); Wu CD(吴成东); Dong ZL(董再励); Liu Z(刘柱)
Indexed BySCI ; EI
EI Accession number20122915258138
WOS IDWOS:000306184400011
Contribution Rank1
Funding OrganizationManuscript received February 20, 2011; revised September 18, 2011; accepted March 27, 2012. Date of publication April 5, 2012; date of current version July 11, 2012. This work was supported by the Chinese Academy of Sciences FEA International Partnership Program for creative research teams. The review of this paper was arranged by Associate Editor C. Zhou.
KeywordAtomic Force Microscope (Afm) Bended Cantilever Shape Reconstruction
AbstractPrinciple of atomic force microscope (AFM) is on the basis of cantilever's deflection. However, up to now, there are still no effective methods to model the cantilever's deflection with high precision, which will usually result in a poor measurement accuracy of AFM and has greatly limited further applications of AFM in more different fields. Thus, a global shape from defocus method, which is only based on a single vision sensor, is introduced in this paper to reconstruct the bended shape of AFM cantilever. First, the model of the defocus imaging is given using the concepts of relative blurring and diffusion equation. Second, the relationship between the relative blurring and the interested depth information is built with basic imaging formulas. Subsequently, the depth measurement problem is transformed into an optimization issue and an algorithm is designed to compute the deflection of cantilever. Finally, extensive experiments are conducted and results are analyzed to show the feasibility and the effectiveness of the proposed method.
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
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Document Type期刊论文
Corresponding AuthorWei YJ(魏阳杰)
Affiliation1.State Key Laboratory of Robotics, Graduate School of Chinese Academy of Sciences, Chinese Academy of Sciences, Shenyang 110016, China
2.School of Information Science and Engineering, Northeast University, Shenyang 110004, China
3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
Recommended Citation
GB/T 7714
Wei YJ,Wu CD,Dong ZL,et al. Global Shape Reconstruction of the Bended AFM Cantilever[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2012,11(4):713-719.
APA Wei YJ,Wu CD,Dong ZL,&Liu Z.(2012).Global Shape Reconstruction of the Bended AFM Cantilever.IEEE TRANSACTIONS ON NANOTECHNOLOGY,11(4),713-719.
MLA Wei YJ,et al."Global Shape Reconstruction of the Bended AFM Cantilever".IEEE TRANSACTIONS ON NANOTECHNOLOGY 11.4(2012):713-719.
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