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The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle
Meng, Kun; Zhang, Weiping; Chen, Wenyuan; Li HY(李洪谊); Chi, Pengcheng; Zou, Caijun; Wu, Xiaosheng; Cui, Feng; Liu, Wu; Chen, Jinge
作者部门机器人学研究室
发表期刊MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
ISSN0946-7076
2012
卷号18期号:1页码:127-136
收录类别SCI ; EI
EI收录号20120414710283
WOS记录号WOS:000301638400014
产权排序2
资助机构This work are supported by the Open Foundation of State Key Laboratory of Robotics (R20200904), the support foundation of the Ministry of Education (62501040303) and the High Technology Research and Development Program of China_863 Program (2009AA04Z203), the Program for New Century Excellent Talents in University from Ministry of Education of China (NCET 10-0583).
摘要An electromagnetic MEMS flapping-wing micro air vehicle at insect scale is presented. The detailed scheme, design, micro fabrication and experiment are given in this paper. Firstly, by commercial software ANSYS and MATLAB, electromagnetic analysis, modal analysis and kinetics analysis are proposed. Moreover, based on the result of theoretical analysis, appropriate structure, material and inherent frequency are selected. Then, a new LIGA-like process based on SU-8 photoresist technology is adopted to fabricate thorax, tergum and vein. Finally, a 3.5 cm wingspan, 144 mg weight prototype is integrated, and then we finish the flapping test for this prototype, which has a flapping resonance frequency range of 120-150 Hz. The test result demonstrates the feasibility solution in the development of FMAV based on MEMS, this work is a stepping-stone on the path toward flying robotic insects.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]MEMBRANE ; INSECT
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/10039
专题机器人学研究室
通讯作者Zhang, Weiping
作者单位1.National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology, Research Institute of Mico/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
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GB/T 7714
Meng, Kun,Zhang, Weiping,Chen, Wenyuan,et al. The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2012,18(1):127-136.
APA Meng, Kun.,Zhang, Weiping.,Chen, Wenyuan.,Li HY.,Chi, Pengcheng.,...&Chen, Jinge.(2012).The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,18(1),127-136.
MLA Meng, Kun,et al."The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 18.1(2012):127-136.
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