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面向半导体设备的Interface A通信方法研究
Alternative TitleResearch on communication method of interface a for semiconductor equipment
叶家发; 刘明哲
Source Publication机械设计与制造
Contribution Rank1
Funding Organization国家科技重大专项项目(2009-10)
Keyword半导体设备 Interface a 数据采集 工厂自动化
Abstract针对半导体设备工厂自动化的设备数据采集需求,给出了一种基于Interface A标准的通信方法,该方法构造了设备的通用模型,设计了设备通信的安全认证和授权机制,并给出了采集设备实时数据的方法,可满足工厂自动化系统对半导体设备的数据采集和设备控制需求。
Other AbstractAccording to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation,this paper present a communication solution based on SEMI Interface A standards.The method,constructing the common equipment model of semiconductor equipment,designing secure authentication and authorization mechanisms,and giving way to real-time data acquisition,would meet the requirement of equipment data acquisition and control for semiconductor equipment in the factory automation. 
Document Type期刊论文
Recommended Citation
GB/T 7714
叶家发,刘明哲. 面向半导体设备的Interface A通信方法研究[J]. 机械设计与制造,2012(5):273-275.
APA 叶家发,&刘明哲.(2012).面向半导体设备的Interface A通信方法研究.机械设计与制造(5),273-275.
MLA 叶家发,et al."面向半导体设备的Interface A通信方法研究".机械设计与制造 .5(2012):273-275.
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