| 面向半导体设备的Interface A通信方法研究 | |
| Alternative Title | Research on communication method of interface a for semiconductor equipment |
叶家发; 刘明哲
| |
| Department | 工业控制网络与系统研究室 |
| Source Publication | 机械设计与制造
 |
| ISSN | 1001-3997 |
| 2012 | |
| Issue | 5Pages:273-275 |
| Contribution Rank | 1 |
| Funding Organization | 国家科技重大专项项目(2009-10) |
| Keyword | 半导体设备 Interface a 数据采集 工厂自动化 |
| Abstract | 针对半导体设备工厂自动化的设备数据采集需求,给出了一种基于Interface A标准的通信方法,该方法构造了设备的通用模型,设计了设备通信的安全认证和授权机制,并给出了采集设备实时数据的方法,可满足工厂自动化系统对半导体设备的数据采集和设备控制需求。 |
| Other Abstract | According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation,this paper present a communication solution based on SEMI Interface A standards.The method,constructing the common equipment model of semiconductor equipment,designing secure authentication and authorization mechanisms,and giving way to real-time data acquisition,would meet the requirement of equipment data acquisition and control for semiconductor equipment in the factory automation. |
| Language | 中文 |
| Document Type | 期刊论文 |
| Identifier | http://ir.sia.cn/handle/173321/10078 |
| Collection | 工业控制网络与系统研究室 |
| Affiliation | 1.中国科学院研究生院 2.中国科学院沈阳自动化研究所 |
| Recommended Citation GB/T 7714 | 叶家发,刘明哲. 面向半导体设备的Interface A通信方法研究[J]. 机械设计与制造,2012(5):273-275. |
| APA | 叶家发,&刘明哲.(2012).面向半导体设备的Interface A通信方法研究.机械设计与制造(5),273-275. |
| MLA | 叶家发,et al."面向半导体设备的Interface A通信方法研究".机械设计与制造 .5(2012):273-275. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 面向半导体设备的InterfaceA通信（229KB） | 开放获取 | License | View Application Full Text | |||
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