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Drift Compensation in AFM-Based Nanomanipulation by Strategic Local Scan
Li GY(李广勇); Wang, Yucai; Liu LQ(刘连庆)
作者部门机器人学研究室
关键词Atomic Force Microscope (Afm) Drift Compensation Nanomanipulation
发表期刊IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
ISSN1545-5955
2012
卷号9期号:4页码:755-762
收录类别SCI ; EI
EI收录号20124215577425
WOS记录号WOS:000309842500013
产权排序2
资助机构This work was supported in part by the U.S. National Science Foundation (NSF) under Grant CNS-1035563.
摘要The drift distorts the atomic force microscopy (AFM) images as the time taken to acquire a complete AFM image is relatively long (a few minutes). As the AFM image is used as a reference for most manipulation mechanisms, the image distorted by drift will cause problems for AFM-based manipulation because the displayed positions of the objects under nanomanipulation do not match their actual locations. The drift during manipulation, similarly, will further exacerbate the mismatch between the displayed positions and the actual locations. Such mismatch is a major hurdle to achieve automation in AFM-based nanomanipulation. Without proper compensation, manipulation based on a wrong displayed location of the object often fails. In this paper, we present an algorithm to identify and eliminate the drift-induced distortion in the AFM image by applying a strategic local scan method. Briefly, after an AFM image is captured, the entire image is divided into several parts along vertical direction. A quick local scan is performed in each part of the image to measure the drift value in that very part. In this manner, the drift value is calculated in a small local area instead of the global image. Thus, the drift can be more precisely estimated and the actual position of the objects can be more accurately identified. In this paper, we also present the strategy to constantly compensate the drift during manipulation. By applying local scan on a single fixed feature in the AFM image frequently, the most current positions of all objects can be displayed in the augmented reality for real-time visual feedback. Notes to Practitioners-Fabrication of nanoscale devices by AFM-based manipulation has attracted much attention recently. However, it is a sequential approach and therefore the throughput is low. To increase the efficiency of AFM-based nanomanipulation, automation is considered to be the ultimate solution. Unfortunately, automation in AFM-based nanomanipulation is facing several technical hurdles. The thermal drift is one of them. Because of the presence of thermal expansion and contraction, the relative position between the tip and the sample undergoes drift with respect to time. Therefore, the AFM images are often distorted due to the thermal drift because the time taken to acquire a complete AFM image is in the range of minutes. This paper tries to tackle this problem by compensating the thermal drift through direct measurement of the thermal drift by local scan. The direct measurement not only can be used to correct the drift-induced distortion in the initial AFM image, it can also be used to compensate the real-time drift during manipulation. Starting from a drift-clean image at the beginning and with drift being compensated in real-time during manipulation, the AFM-based nanomanipulation can be more accurate and efficient. The research results here is one of the important steps to achieve full automation in AFM-based nanomanipulation.
语种英语
WOS标题词Science & Technology ; Technology
WOS类目Automation & Control Systems
关键词[WOS]ATOMIC-FORCE MICROSCOPE ; CONTROLLED MANIPULATION ; PROBE MICROSCOPES ; NANOPARTICLES ; ELIMINATION ; CALIBRATION ; SAMPLES ; IMAGES
WOS研究方向Automation & Control Systems
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/10126
专题机器人学研究室
通讯作者Li GY(李广勇)
作者单位1.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA 15261, United States
2.Department of Electrical and Computer Engineering, McGill University, Montreal, QC H3A 2A7, Canada
3.Shenyang Institute of Automation, Chinese Academy of Science, Shenyang, Liaoning 110016, China
推荐引用方式
GB/T 7714
Li GY,Wang, Yucai,Liu LQ. Drift Compensation in AFM-Based Nanomanipulation by Strategic Local Scan[J]. IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,2012,9(4):755-762.
APA Li GY,Wang, Yucai,&Liu LQ.(2012).Drift Compensation in AFM-Based Nanomanipulation by Strategic Local Scan.IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,9(4),755-762.
MLA Li GY,et al."Drift Compensation in AFM-Based Nanomanipulation by Strategic Local Scan".IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING 9.4(2012):755-762.
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