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题名: Investigation on electrode size of high frequency ultrasonic transducers
作者: Wei YJ(魏阳杰) ; Thomas Herzog ; Henning Heuer
作者部门: 机器人学研究室
会议名称: 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012)
会议日期: August 19-24, 2012
会议地点: Rome, Italy
会议主办者: The International Academy, Research and Industry Association (IARIA)
会议录: 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012)
会议录出版者: IARIA
出版日期: 2012
页码: 137-142
ISBN号: 978-1-61208-208-0
关键词: Electrode size ; electric impedance matching ; ultrasonic transducer
摘要: This paper presents a concept to increase the performance of high frequency ultrasonic transducers. For a sandwich high frequency ultrasonic transducer, the top electrode should be smaller than the piezoelectric plate to avoid shortcuts and edge effects. However, its size can influence properties of the transducer, and until now there is no research about it published. A theoretical investigation about influence of the top electrode size on properties of a transducer is conducted in this paper. First, two factors related with the top electrode size based on transmission coefficient and stored energy are proposed; Then, analysis on an Al-AlNAl on silicon wafers with different electrode sizes are performed and the results prove the effectiveness and the validity of the proposed factors. Finally, electrical impedance matching experiments are conducted to improve the properties of transducers with different electrode sizes, and the experiment results show that the improved resolution and sensitivity after matching.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/10204
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
魏阳杰; Thomas Herzog; Henning Heuer.Investigation on electrode size of high frequency ultrasonic transducers.见:IARIA.3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012) ,,2012,137-142
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