| Investigation on electrode size of high frequency ultrasonic transducers | |
| Wei YJ(魏阳杰); Thomas Herzog; Henning Heuer | |
| Department | 机器人学研究室 |
| Conference Name | 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012) |
| Conference Date | August 19-24, 2012 |
| Conference Place | Rome, Italy |
| Author of Source | The International Academy, Research and Industry Association (IARIA) |
| Source Publication | 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012) |
| Publisher | IARIA |
| 2012 | |
| Pages | 137-142 |
| Contribution Rank | 1 |
| ISBN | 978-1-61208-208-0 |
| Keyword | Electrode Size Electric Impedance Matching Ultrasonic Transducer |
| Abstract | This paper presents a concept to increase the performance of high frequency ultrasonic transducers. For a sandwich high frequency ultrasonic transducer, the top electrode should be smaller than the piezoelectric plate to avoid shortcuts and edge effects. However, its size can influence properties of the transducer, and until now there is no research about it published. A theoretical investigation about influence of the top electrode size on properties of a transducer is conducted in this paper. First, two factors related with the top electrode size based on transmission coefficient and stored energy are proposed; Then, analysis on an Al-AlNAl on silicon wafers with different electrode sizes are performed and the results prove the effectiveness and the validity of the proposed factors. Finally, electrical impedance matching experiments are conducted to improve the properties of transducers with different electrode sizes, and the experiment results show that the improved resolution and sensitivity after matching. |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://ir.sia.cn/handle/173321/10204 |
| Collection | 机器人学研究室 |
| Affiliation | 1.Graduate School of Chinese Academy of Science 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, CAS, Shenyang, China 3.Department of Sensor and Sensor System, Fraunhofer Institute for Non-Destructive Testing, IZFP, Dresden Branch, Dresden, Germany |
| Recommended Citation GB/T 7714 | Wei YJ,Thomas Herzog,Henning Heuer. Investigation on electrode size of high frequency ultrasonic transducers[C]//The International Academy, Research and Industry Association (IARIA):IARIA,2012:137-142. |
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| File Name/Size | DocType | Version | Access | License | ||
| Investigation on ele（272KB） | 会议论文 | 开放获取 | CC BY-NC-SA | View Application Full Text | ||
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