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Investigation on electrode size of high frequency ultrasonic transducers
Wei YJ(魏阳杰); Thomas Herzog; Henning Heuer
Department机器人学研究室
Conference Name3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012)
Conference DateAugust 19-24, 2012
Conference PlaceRome, Italy
Author of SourceThe International Academy, Research and Industry Association (IARIA)
Source Publication3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012)
PublisherIARIA
2012
Pages137-142
Contribution Rank1
ISBN978-1-61208-208-0
KeywordElectrode Size Electric Impedance Matching Ultrasonic Transducer
AbstractThis paper presents a concept to increase the performance of high frequency ultrasonic transducers. For a sandwich high frequency ultrasonic transducer, the top electrode should be smaller than the piezoelectric plate to avoid shortcuts and edge effects. However, its size can influence properties of the transducer, and until now there is no research about it published. A theoretical investigation about influence of the top electrode size on properties of a transducer is conducted in this paper. First, two factors related with the top electrode size based on transmission coefficient and stored energy are proposed; Then, analysis on an Al-AlNAl on silicon wafers with different electrode sizes are performed and the results prove the effectiveness and the validity of the proposed factors. Finally, electrical impedance matching experiments are conducted to improve the properties of transducers with different electrode sizes, and the experiment results show that the improved resolution and sensitivity after matching.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/10204
Collection机器人学研究室
Affiliation1.Graduate School of Chinese Academy of Science
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, CAS, Shenyang, China
3.Department of Sensor and Sensor System, Fraunhofer Institute for Non-Destructive Testing, IZFP, Dresden Branch, Dresden, Germany
Recommended Citation
GB/T 7714
Wei YJ,Thomas Herzog,Henning Heuer. Investigation on electrode size of high frequency ultrasonic transducers[C]//The International Academy, Research and Industry Association (IARIA):IARIA,2012:137-142.
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