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题名: Research and implementation of the interface a data collection management
作者: Ye JF(叶家发) ; Liu MZ(刘明哲) ; Wang YN(王亚楠)
作者部门: 工业控制网络与系统研究室
会议名称: 2012 2nd International Conference on Consumer Electronics, Communications and Networks, CECNet 2012
会议日期: April 21-23, 2012
会议地点: Yichang, China
会议录: 2012 2nd International Conference on Consumer Electronics, Communications and Networks (CECNet)
会议录出版者: IEEE
会议录出版地: New York, USA
出版日期: 2012
页码: 1996-1999
收录类别: EI
ISBN号: 978-1-4577-1415-3
关键词: semiconductor equipment ; factory automation ; Interface A ; data collection
摘要: According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation, this paper presents a new method to acquire the equipment data, which is based on the SEMI Interface A for data collection management. The method defines how to collect the information which we need through the use of a named data collection plan. The testing results show that the method meets the requirement of equipment data acquisition in the factory automation.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/10243
Appears in Collections:工业控制网络与系统研究室_会议论文

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