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基于模糊模型的CMP过程智能R2R预测控制方法
Alternative TitleFuzzy Model Based Intelligent R2R Predictive Control to CMP Process
王亮; 胡静涛
Department信息服务与智能控制技术研究室
Source Publication计算机测量与控制
ISSN1671-4598
2012
Volume20Issue:6Pages:1558-1561
Indexed ByCSCD
CSCD IDCSCD:4597326
Contribution Rank1
Funding Organization国家科技重大专项基金(2009ZX02008-003,2009ZX02001-005)资助;; 沈阳市科技项目(108155-2-00)资助
Keyword化学机械研磨 T-s模糊模型 批次控制 预测控制 克隆选择
Abstract针对化学机械研磨(CMP)过程非线性、时变和产品质量不易在线测量的特性,提出了一种基于T-S模糊模型的CMP过程智能run-to-run(R2R)预测控制器FIPR2R;通过G-K聚类算法和最小二乘法对CMP过程的T-S模糊预测模型离线辨识,解决了复杂CMP过程难以建立精确数学模型的难题和提高了模型预测精度;通过双指数加权移动平均(dEWMA)中对过程扰动及漂移进行估计的方法实现反馈校正和基于克隆选择算法的滚动优化求取最优控制律,提高了控制精度;性能分析结果表明,FIPR2R控制器的控制性能优于dEWMA方法,有效抑制了过程扰动和漂移的影响。
Other AbstractFor chemical mechanical polishing (CMP) process characteristics of nonlinear,time-varying and not being in-situ measured easily,a CMP process intelligent run-to-run (R2R) predictive controller named FIPR2R is proposed.CMP process T-S fuzzy predictive model off-line identified by G-K clustering algorithms and least squares method solves difficult problem of constructing accurate mathematical model of complicated CMP and reduces model error.Feedback correction is achieved from disturbances and drifts estimate...
Language中文
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/10326
Collection信息服务与智能控制技术研究室
Affiliation1.中国科学院沈阳自动化所工业信息学重点实验室
2.中国科学院研究生院
3.沈阳化工大学计算机科学与技术学院
Recommended Citation
GB/T 7714
王亮,胡静涛. 基于模糊模型的CMP过程智能R2R预测控制方法[J]. 计算机测量与控制,2012,20(6):1558-1561.
APA 王亮,&胡静涛.(2012).基于模糊模型的CMP过程智能R2R预测控制方法.计算机测量与控制,20(6),1558-1561.
MLA 王亮,et al."基于模糊模型的CMP过程智能R2R预测控制方法".计算机测量与控制 20.6(2012):1558-1561.
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