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Study on the large-scale assembly and fabrication method for SWCNTs nano device
Xu K(许可); Tian XJ(田孝军); Wu CD(吴成东); Liu J(刘剑); Li MX(李孟歆); Dong ZL(董再励)
作者部门机器人学研究室
关键词Large-scale Single-walled Carbon Nanotube Assembly Floating Potential Dielectrophoresis
发表期刊SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
ISSN1674-7348
2013
卷号56期号:3页码:556-561
收录类别SCI ; EI
EI收录号20140317200587
WOS记录号WOS:000314912300013
产权排序1
摘要The large-scale assembly and fabrication method for single-walled carbon nanotube (SWCNT) nano devices was implemented. Assembly of SWCNT field effect transistor (FET) was realized by floating potential dielectrophoresis approach. The simulation of floating potential distribution of the chip was performed by comsol multiphysics coupling software. Six hundred devices were assembled on the area of less than one square centimeter. The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy. The experimental results showed that large-scale assembly had been realized, and the success rate of ideal assembly for SWCNT FET had been assessed.
语种英语
WOS标题词Science & Technology ; Physical Sciences
WOS类目Physics, Multidisciplinary
关键词[WOS]CARBON NANOTUBE ; TRANSISTORS
WOS研究方向Physics
引用统计
被引频次:5[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/10638
专题机器人学研究室
通讯作者Tian XJ(田孝军)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.School of Information and Control Engineering, Shenyang Jianzhu University, Shenyang 110168, China
3.School of Information Science and Engineering, Northeastern University, Shenyang 110004, China
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GB/T 7714
Xu K,Tian XJ,Wu CD,et al. Study on the large-scale assembly and fabrication method for SWCNTs nano device[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2013,56(3):556-561.
APA Xu K,Tian XJ,Wu CD,Liu J,Li MX,&Dong ZL.(2013).Study on the large-scale assembly and fabrication method for SWCNTs nano device.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,56(3),556-561.
MLA Xu K,et al."Study on the large-scale assembly and fabrication method for SWCNTs nano device".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 56.3(2013):556-561.
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