中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 工业控制网络与系统研究室  > 学位论文
题名: 半导体装备物料传输软件平台研究与开发
其他题名: Research and Development of Material Transfer Software Platform in IC Equipment Controlling System
作者: 王亚楠
导师: 刘明哲
分类号: TN805
关键词: 半导体装备 ; 软件平台 ; 工厂自动化 ; 物料传输系统
页码: 70页
学位专业: 计算机应用技术
学位类别: 硕士
答辩日期: 2013-05-28
授予单位: 中国科学院沈阳自动化研究所
作者部门: 工业控制网络与系统研究室
中文摘要: 以半导体装备制造过程中的重要组成部分物料传输系统作为研究对象,设计和实现了半导体装备物料传输软件平台。首先对大多数半导体装备生产厂商物料传输系统的通用需求做了分析,在此需求分析的基础上根据标准性和通用性的原则设计软件平台的系统架构。然后对软件的功能架构进行了模块化的划分,将具备不同功能的模块独立开发,提高软件的复用性。最后使用面向对象的语言C++编程实现。为验证软件平台的适用性,使用大气机械手和真空机械手构成的物料传输平台对系统的进行了测试与验证,结果显示基于物料传输软件平台能够快速完成实验平台控制软件的开发。本文还考虑物料传输系统在工厂应用中对工厂自动化的支持,并严格遵循SEMI国际标准对半导体装备控制软件的开发过程的相关定义。本课题的研究对于帮助企业在已有物料传输软件平台的基础上根据自身需求进行快速的二次开发,提高开发效率,降低开发成本,缩短我国在通用性半导体装备系统的研究方面与国际上的差距,具有十分重要的意义。
英文摘要: This paper carefully researches material transfer system which is an important part of the semiconductor equipment manufacturing, then designs and realizes a material transfer software platform of the semiconductor the equipment controlling system. Firstly, this paper analyses the universal needs of the most semiconductor equipment manufacturers for the material transmission system, then designs the system architecture of the software platform in accordance with the universal standard and principle. Secondly, this paper divides the functional architecture of the software into several modules, and then develops each module independently in order to improve the software's reusability. Finally, this paper develops the software by programming in the object-oriented language C++. In order to verify the applicability of this software platform, this paper uses a material transport platform composed by atmospheric robot and vacuum robot to do the testing and verification. The results shows that the development of the experimental platform control software can be quickly completed based on the material transfer software platform. This paper also takes the support for Fab into consideration and strictly follows the definitions of the SEMI International Standards related with the semiconductor equipment control software development process. This research has extremely vital significance to help enterprises to do the secondary software development rapidly according to their own needs on the basis of the existing material transfer software platform, improve development efficiency, reduce development costs as well as shorten our gap with the international research in the general-purpose semiconductor equipment systems.
语种: 中文
产权排序: 1
内容类型: 学位论文
URI标识: http://ir.sia.cn/handle/173321/10737
Appears in Collections:工业控制网络与系统研究室_学位论文

Files in This Item:
File Name/ File Size Content Type Version Access License
半导体装备物料传输软件平台研究与开发.pdf(1383KB)----限制开放 联系获取全文

Recommended Citation:
王亚楠.半导体装备物料传输软件平台研究与开发.[硕士学位论文].中国科学院沈阳自动化研究所.2013
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[王亚楠]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[王亚楠]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace