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题名: Atomic force microscope deposition assisted by electric field
作者: Liu ZL(刘增磊) ; Jiao ND(焦念东) ; Wang ZD(王志东) ; Dong ZL(董再励) ; Liu LQ(刘连庆)
作者部门: 机器人学研究室
会议名称: 2013 2nd International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2013
会议日期: January 23-24, 2013
会议地点: Shenzhen, China
会议主办者: International Information Engineering Institute, USA
会议录: Advanced Materials Research
会议录出版者: Trans Tech Publications
会议录出版地: Clausthal-Zellerfeld, Germany
出版日期: 2013
页码: 69-73
收录类别: EI
ISSN号: 1022-6680
ISBN号: 978-3037856420
关键词: Atomic force microscopy ; Electric fields ; Electric properties ; Field emission ; Nanostructured materials ; Nanostructures
摘要: This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is introduced in this paper, which provides theoretical explanation for AFM deposition. Dot matrixes are fabricated by AFM deposition on three different substrates, Si, Au and GaAs. Differences of deposition on the three substrates are discussed. AFM deposition has many practical applications. For example, AFM deposition can be used to solder nano components together to improve electrical properties of nanodevices. Besides nanosoldering, AFM deposition can also be used in fabrication of nanodevices. Thus AFM deposition is a valuable research field for future massive applications of nanodevices.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/12411
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
刘增磊; 焦念东; 王志东; 董再励; 刘连庆.Atomic force microscope deposition assisted by electric field.见:Trans Tech Publications.Advanced Materials Research,Clausthal-Zellerfeld, Germany,2013,69-73
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