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Atomic force microscope deposition assisted by electric field
Liu ZL(刘增磊); Jiao ND(焦念东); Wang ZD(王志东); Dong ZL(董再励); Liu LQ(刘连庆)
作者部门机器人学研究室
会议名称2013 2nd International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2013
会议日期January 23-24, 2013
会议地点Shenzhen, China
会议主办者International Information Engineering Institute, USA
会议录名称Advanced Materials Research
出版者Trans Tech Publications
出版地Clausthal-Zellerfeld, Germany
2013
页码69-73
收录类别EI
EI收录号20131616209047
产权排序1
ISSN号1022-6680
ISBN号978-3-03785-642-0
关键词Atomic Force Microscopy Electric Fields Electric Properties Field Emission Nanostructured Materials Nanostructures
摘要This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is introduced in this paper, which provides theoretical explanation for AFM deposition. Dot matrixes are fabricated by AFM deposition on three different substrates, Si, Au and GaAs. Differences of deposition on the three substrates are discussed. AFM deposition has many practical applications. For example, AFM deposition can be used to solder nano components together to improve electrical properties of nanodevices. Besides nanosoldering, AFM deposition can also be used in fabrication of nanodevices. Thus AFM deposition is a valuable research field for future massive applications of nanodevices.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/12411
专题机器人学研究室
通讯作者Liu ZL(刘增磊)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.Graduate University of Chinese Academy of Sciences, Beijing 100049, China
3.Chiba Institute of Technology, Chiba 275-8588, Japan
推荐引用方式
GB/T 7714
Liu ZL,Jiao ND,Wang ZD,et al. Atomic force microscope deposition assisted by electric field[C]//International Information Engineering Institute, USA. Clausthal-Zellerfeld, Germany:Trans Tech Publications,2013:69-73.
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