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Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices
Zheng MJ(郑美娟); Qu YL(曲艳丽); Zhang, YZ; Dong ZL(董再励)
作者部门机器人学研究室
关键词Optically Induced Dielectrophoresis Automatic Assembly Micro Nano-devices Rapid And Precise Manipulation
发表期刊INTEGRATED FERROELECTRICS
ISSN1058-4587
2013
卷号145期号:1页码:24-31
收录类别SCI ; EI
EI收录号20133316614730
WOS记录号WOS:000321687200004
产权排序1
资助机构Natural Science Foundation of China [61107043]; State Key Laboratory of Robotics [2009Z02]; CAS/SAFEA
摘要Optically induced dielectrophoresis (ODEP) provides a powerful method for parallel manipulation of micro/nano-scale particles with dynamic optical patterns. Until now, few ODEP-related researches has been done for automatic assembly of micro/nano-devices which have a profound effect on the application of nanomaterials. In this paper, an innovative ODEP platform is investigated for automatic and repeatable micro/nano-scale material assembly by integrating image acquisition module, image analysis module, light pattern generation module with micro step motion module. Image analysis module was successfully designed to automatically analyze the images obtained from the image acquisition module and recognize the shape and position of the manipulated objects in the images. The programed light pattern generation module allows for arbitrary and reconfigurable optical patterns based on the recognition results. A high resolution 3D motorized stage upon which the ODEP chip is fixed offers rapid and precise movement of the chip in micro scale. The automatic patterning of polystyrene beads and assembling of multi-walled carbon nanotubes (MWCNTs) into array had been accomplished by the ODEP platform. Experiment results proved that our platform is very effective and shows a promising potential for automatic assembly of micro/nano-devices in wafer-scale requiring massively parallel manipulation.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
关键词[WOS]PARTICLES ; TWEEZERS
WOS研究方向Engineering ; Physics
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/12558
专题机器人学研究室
通讯作者Zheng MJ(郑美娟)
作者单位1.Shenyang Ligong University, Shenyang, 110059, China
2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式
GB/T 7714
Zheng MJ,Qu YL,Zhang, YZ,et al. Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices[J]. INTEGRATED FERROELECTRICS,2013,145(1):24-31.
APA Zheng MJ,Qu YL,Zhang, YZ,&Dong ZL.(2013).Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices.INTEGRATED FERROELECTRICS,145(1),24-31.
MLA Zheng MJ,et al."Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices".INTEGRATED FERROELECTRICS 145.1(2013):24-31.
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