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Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices
Zheng MJ(郑美娟); Qu YL(曲艳丽); Zhang, YZ; Dong ZL(董再励)
Department机器人学研究室
Source PublicationINTEGRATED FERROELECTRICS
ISSN1058-4587
2013
Volume145Issue:1Pages:24-31
Indexed BySCI ; EI
EI Accession number20133316614730
WOS IDWOS:000321687200004
Contribution Rank1
Funding OrganizationNatural Science Foundation of China [61107043]; State Key Laboratory of Robotics [2009Z02]; CAS/SAFEA
KeywordOptically Induced Dielectrophoresis Automatic Assembly Micro Nano-devices Rapid And Precise Manipulation
AbstractOptically induced dielectrophoresis (ODEP) provides a powerful method for parallel manipulation of micro/nano-scale particles with dynamic optical patterns. Until now, few ODEP-related researches has been done for automatic assembly of micro/nano-devices which have a profound effect on the application of nanomaterials. In this paper, an innovative ODEP platform is investigated for automatic and repeatable micro/nano-scale material assembly by integrating image acquisition module, image analysis module, light pattern generation module with micro step motion module. Image analysis module was successfully designed to automatically analyze the images obtained from the image acquisition module and recognize the shape and position of the manipulated objects in the images. The programed light pattern generation module allows for arbitrary and reconfigurable optical patterns based on the recognition results. A high resolution 3D motorized stage upon which the ODEP chip is fixed offers rapid and precise movement of the chip in micro scale. The automatic patterning of polystyrene beads and assembling of multi-walled carbon nanotubes (MWCNTs) into array had been accomplished by the ODEP platform. Experiment results proved that our platform is very effective and shows a promising potential for automatic assembly of micro/nano-devices in wafer-scale requiring massively parallel manipulation.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectEngineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
WOS KeywordPARTICLES ; TWEEZERS
WOS Research AreaEngineering ; Physics
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/12558
Collection机器人学研究室
Corresponding AuthorZheng MJ(郑美娟)
Affiliation1.Shenyang Ligong University, Shenyang, 110059, China
2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
Recommended Citation
GB/T 7714
Zheng MJ,Qu YL,Zhang, YZ,et al. Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices[J]. INTEGRATED FERROELECTRICS,2013,145(1):24-31.
APA Zheng MJ,Qu YL,Zhang, YZ,&Dong ZL.(2013).Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices.INTEGRATED FERROELECTRICS,145(1),24-31.
MLA Zheng MJ,et al."Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices".INTEGRATED FERROELECTRICS 145.1(2013):24-31.
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