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题名: Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices
作者: Zheng MJ(郑美娟) ; Qu YL(曲艳丽) ; Zhang, YZ ; Dong ZL(董再励)
作者部门: 机器人学研究室
关键词: Optically induced dielectrophoresis ; automatic assembly ; micro ; nano-devices ; rapid and precise manipulation
刊名: INTEGRATED FERROELECTRICS
ISSN号: 1058-4587
出版日期: 2013
卷号: 145, 期号:1, 页码:24-31
收录类别: SCI ; EI
产权排序: 1
摘要: Optically induced dielectrophoresis (ODEP) provides a powerful method for parallel manipulation of micro/nano-scale particles with dynamic optical patterns. Until now, few ODEP-related researches has been done for automatic assembly of micro/nano-devices which have a profound effect on the application of nanomaterials. In this paper, an innovative ODEP platform is investigated for automatic and repeatable micro/nano-scale material assembly by integrating image acquisition module, image analysis module, light pattern generation module with micro step motion module. Image analysis module was successfully designed to automatically analyze the images obtained from the image acquisition module and recognize the shape and position of the manipulated objects in the images. The programed light pattern generation module allows for arbitrary and reconfigurable optical patterns based on the recognition results. A high resolution 3D motorized stage upon which the ODEP chip is fixed offers rapid and precise movement of the chip in micro scale. The automatic patterning of polystyrene beads and assembling of multi-walled carbon nanotubes (MWCNTs) into array had been accomplished by the ODEP platform. Experiment results proved that our platform is very effective and shows a promising potential for automatic assembly of micro/nano-devices in wafer-scale requiring massively parallel manipulation.
语种: 英语
WOS记录号: WOS:000321687200004
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter
关键词[WOS]: PARTICLES ; TWEEZERS
研究领域[WOS]: Engineering ; Physics
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内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/12558
Appears in Collections:机器人学研究室_期刊论文

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Recommended Citation:
郑美娟; 曲艳丽; Zhang, YZ; 董再励.Optically Induced Dielectrophoresis Based Automatic Assembly of Micro/Nano-Devices,INTEGRATED FERROELECTRICS,2013,145(1):24-31
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文件名: Optically Induced Dielectrophoresis Based Automatic Assembly of Micro Nano-Devices.pdf
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