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Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers
Wei YJ(魏阳杰); Herzog, Thomas; Heuer, Henning
作者部门机器人学研究室
关键词Electrode Size Electrical Impedance Matching Stacked Transducer Ultrasonic Transducer.
发表期刊Sensors & Transducers
ISSN2306-8515
2013
卷号18期号:SPEC.ISS.1页码:66-75
收录类别EI
EI收录号20133016530782
产权排序1
摘要

This paper presents three methods to improve the performance of a high frequency aluminum nitride (AlN) ultrasonic transducer. For a high frequency AlN ultrasonic transducer, its properties are related with its top electrode size, electrical impedance matching and layers of the piezoelectric plate. However, until now, no research has been published to analyze their influence on the performance of AlN ultrasonic transducers, especially in the frequency range above 200 MHz. First, two factors related with the top electrode size are proposed based on transmission coefficient and stored energy, and analysis is performed on an Al-AlN-Al on silicon wafers with different electrode sizes. The result proves when the electrode size is 1mm2, the transducer can provide the maximum output voltage and the maximal signal- to-noise ratio (SNR). Then, electrical impedance matching is conducted to improve the performance of transducers, and the experiment result shows that after matching, the resolution and sensitivity have been improved. Finally, a stacked AlN transducer is developed and its model is constructed to analyze its properties in time domain and frequency domain. The comparison between the simulation and the experiment shows the effectiveness of the proposed model, and a stacked structure can be used to improve the sensitivity of a high frequency AlN ultrasonic transducer.

语种英语
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/12560
专题机器人学研究室
通讯作者Wei YJ(魏阳杰)
作者单位1.Gradate School of Chinese Academy of Sciences, and the State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Nanta Str. 114, 110016, China
2.Fraunhofer Institute for Non-Destructive Testing, Dresden Branch, Maria-Reiche-Str. 2, 01109 Dresden, Germany
推荐引用方式
GB/T 7714
Wei YJ,Herzog, Thomas,Heuer, Henning. Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers[J]. Sensors & Transducers,2013,18(SPEC.ISS.1):66-75.
APA Wei YJ,Herzog, Thomas,&Heuer, Henning.(2013).Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers.Sensors & Transducers,18(SPEC.ISS.1),66-75.
MLA Wei YJ,et al."Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers".Sensors & Transducers 18.SPEC.ISS.1(2013):66-75.
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