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Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers
Wei YJ(魏阳杰); Herzog, Thomas; Heuer, Henning
Department机器人学研究室
Source PublicationSensors & Transducers
ISSN2306-8515
2013
Volume18Issue:SPEC.ISS.1Pages:66-75
Indexed ByEI
EI Accession number20133016530782
Contribution Rank1
KeywordElectrode Size Electrical Impedance Matching Stacked Transducer Ultrasonic Transducer.
Abstract

This paper presents three methods to improve the performance of a high frequency aluminum nitride (AlN) ultrasonic transducer. For a high frequency AlN ultrasonic transducer, its properties are related with its top electrode size, electrical impedance matching and layers of the piezoelectric plate. However, until now, no research has been published to analyze their influence on the performance of AlN ultrasonic transducers, especially in the frequency range above 200 MHz. First, two factors related with the top electrode size are proposed based on transmission coefficient and stored energy, and analysis is performed on an Al-AlN-Al on silicon wafers with different electrode sizes. The result proves when the electrode size is 1mm2, the transducer can provide the maximum output voltage and the maximal signal- to-noise ratio (SNR). Then, electrical impedance matching is conducted to improve the performance of transducers, and the experiment result shows that after matching, the resolution and sensitivity have been improved. Finally, a stacked AlN transducer is developed and its model is constructed to analyze its properties in time domain and frequency domain. The comparison between the simulation and the experiment shows the effectiveness of the proposed model, and a stacked structure can be used to improve the sensitivity of a high frequency AlN ultrasonic transducer.

Language英语
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/12560
Collection机器人学研究室
Corresponding AuthorWei YJ(魏阳杰)
Affiliation1.Gradate School of Chinese Academy of Sciences, and the State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Nanta Str. 114, 110016, China
2.Fraunhofer Institute for Non-Destructive Testing, Dresden Branch, Maria-Reiche-Str. 2, 01109 Dresden, Germany
Recommended Citation
GB/T 7714
Wei YJ,Herzog, Thomas,Heuer, Henning. Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers[J]. Sensors & Transducers,2013,18(SPEC.ISS.1):66-75.
APA Wei YJ,Herzog, Thomas,&Heuer, Henning.(2013).Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers.Sensors & Transducers,18(SPEC.ISS.1),66-75.
MLA Wei YJ,et al."Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers".Sensors & Transducers 18.SPEC.ISS.1(2013):66-75.
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