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Alternative TitleMethod for realizing transmission control platformization of semiconductor manufacturing equipment front end module
于海斌; 徐皑冬; 张吉龙; 刘明哲; 胡静涛; 李正
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other Abstract

The invention relates to a method for realizing transmission control platformization of a semiconductor manufacturing equipment front end module, which comprises the steps that: a corresponding subsystem management module, a communication interface module, an analysis module and a network communication module are established the communication interface module receives a control command sent by a semiconductor manufacturing equipment control system and transfers the control command to the subsystem management module the subsystem management module analyzes the control command and distributes the analyzed control command to corresponding subsystem modules, and a plurality of subsystem modules send the command to a controller through the network communication module, and can execute the control command in parallel and the analysis module analyzes the received controller information, feeds back a command operation result to a corresponding subsystem module, and then feeds back the command operation result to the semiconductor manufacturing equipment control system through the communication interface module. A standardized software interface is provided for the semiconductor manufacturing equipment front end module, so that the standardization of different IC (integrated circuit) equipment control systems is favored, the production efficiency of the system is improved, and the adaptability of the system is improved.

PCT Attributes
Application Date2010-12-30
Date Available2015-06-10
Application NumberCN201010616602.1
Open (Notice) NumberCN102566527A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
于海斌,徐皑冬,张吉龙,等. 半导体制造设备前端模块的传输控制平台化实现方法[P]. 2012-07-11.
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File name: CN201010616602.1.pdf
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