SIA OpenIR  > 工业控制网络与系统研究室
半导体制造设备前端模块的传输控制平台化实现方法
Alternative TitleMethod for realizing transmission control platformization of semiconductor manufacturing equipment front end module
于海斌; 徐皑冬; 张吉龙; 刘明哲; 胡静涛; 李正
Department工业控制网络与系统研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status有权
Abstract本发明涉及一种半导体制造设备前端模块的传输控制平台化实现方法,步骤为:建立相应的子系统管理模块、通讯接口模块、解析模块和网络通讯模块;通讯接口模块接收到半导体制造设备控制系统发送的控制指令,转发给子系统管理模块;子系统管理模块对控制指令进行解析,分发给相应的子系统模块,子系统模块通过网络通讯模块向控制器发送指令,多个子系统模块可并行执行控制指令;解析模块对接收到的控制器消息进行解析,将指令运行结果反馈给相应的子系统模块,再由通讯接口模块反馈给半导体制造设备控制系统。本发明为半导体制造设备前端模块提供了标准化的软件接口,有利于不同IC装备控制系统标准化;提高了系统的生产效率,提高了系统的适应性。
Other Abstract

The invention relates to a method for realizing transmission control platformization of a semiconductor manufacturing equipment front end module, which comprises the steps that: a corresponding subsystem management module, a communication interface module, an analysis module and a network communication module are established the communication interface module receives a control command sent by a semiconductor manufacturing equipment control system and transfers the control command to the subsystem management module the subsystem management module analyzes the control command and distributes the analyzed control command to corresponding subsystem modules, and a plurality of subsystem modules send the command to a controller through the network communication module, and can execute the control command in parallel and the analysis module analyzes the received controller information, feeds back a command operation result to a corresponding subsystem module, and then feeds back the command operation result to the semiconductor manufacturing equipment control system through the communication interface module. A standardized software interface is provided for the semiconductor manufacturing equipment front end module, so that the standardization of different IC (integrated circuit) equipment control systems is favored, the production efficiency of the system is improved, and the adaptability of the system is improved.

PCT Attributes
Application Date2010-12-30
2012-07-11
Date Available2015-06-10
Application NumberCN201010616602.1
Open (Notice) NumberCN102566527A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/12830
Collection工业控制网络与系统研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
于海斌,徐皑冬,张吉龙,等. 半导体制造设备前端模块的传输控制平台化实现方法[P]. 2012-07-11.
Files in This Item: Download All
File Name/Size DocType Version Access License
CN201010616602.1.pdf(553KB)专利 开放获取ODC PDDLView Download
CN201010616602.1授权.p(528KB)专利 开放获取ODC PDDLView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[于海斌]'s Articles
[徐皑冬]'s Articles
[张吉龙]'s Articles
Baidu academic
Similar articles in Baidu academic
[于海斌]'s Articles
[徐皑冬]'s Articles
[张吉龙]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[于海斌]'s Articles
[徐皑冬]'s Articles
[张吉龙]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: CN201010616602.1.pdf
Format: Adobe PDF
File name: CN201010616602.1授权.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.