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METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE
其他题名面向IC装备控制软件的GUI平台化实现方法
Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
所属部门工业控制网络与系统研究室
专利权人SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
授权国家世界专利组织
专利类型发明
专利状态公开
摘要The present invention relates to a method for implementing Graphical User Interface (GUI) platform for integrate circuit (IC) equipment controlling software, which includes the following steps: developing corresponding IC equipment driver module and drawing GUI platform interface according to the characteristics of the IC equipments produced by different manufacturers connecting the monitor mainframe of the IC equipment with a controller through the IC equipment driver module and forming a communication network and, reading/writing controller data through the communication network by the IC equipment driver module, and mapping the data to universal data layer of the GUI platform. The GUI platform interface uses the universal data layer to perform data real-time display, control and abnormity processing, and thus, the GUI platform for the IC equipment control software is implemented. The present invention implements cross-platform mechanism, improves the cluster monitoring capacity of wafer manufacture equipment, satisfies the user demand of flexible construction and configuration of Human-Machine interface of corresponding control system, enables rapid construction of the whole producing process in a short time, and ensure the demand of producing startup ahead of time.
优先权数据cn20101508022
PCT属性
申请日期2010-11-29
2012-04-19
申请号WO2010CN79216
公开(公告)号WO2012048491A1
语种英语
产权排序1
文献类型专利
条目标识符http://ir.sia.cn/handle/173321/12860
专题工业控制网络与系统研究室
作者单位SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
推荐引用方式
GB/T 7714
Yu HB,Xu AD,Liu MZ,et al. METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE[P]. 2012-04-19.
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