SIA OpenIR  > 工业控制网络与系统研究室
METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE
Alternative Title面向IC装备控制软件的GUI平台化实现方法
Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
Department工业控制网络与系统研究室
Rights HolderSHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
Country世界专利组织
Subtype发明
Status公开
AbstractThe present invention relates to a method for implementing Graphical User Interface (GUI) platform for integrate circuit (IC) equipment controlling software, which includes the following steps: developing corresponding IC equipment driver module and drawing GUI platform interface according to the characteristics of the IC equipments produced by different manufacturers connecting the monitor mainframe of the IC equipment with a controller through the IC equipment driver module and forming a communication network and, reading/writing controller data through the communication network by the IC equipment driver module, and mapping the data to universal data layer of the GUI platform. The GUI platform interface uses the universal data layer to perform data real-time display, control and abnormity processing, and thus, the GUI platform for the IC equipment control software is implemented. The present invention implements cross-platform mechanism, improves the cluster monitoring capacity of wafer manufacture equipment, satisfies the user demand of flexible construction and configuration of Human-Machine interface of corresponding control system, enables rapid construction of the whole producing process in a short time, and ensure the demand of producing startup ahead of time.
description.patentprioritydatacn20101508022
PCT Attributes
Application Date2010-11-29
2012-04-19
Application NumberWO2010CN79216
Open (Notice) NumberWO2012048491A1
Language英语
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/12860
Collection工业控制网络与系统研究室
AffiliationSHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
Recommended Citation
GB/T 7714
Yu HB,Xu AD,Liu MZ,et al. METHOD FOR IMPLEMENTING GUI PLATFORM FOR IC EQUIPMENT CONTROL SOFTWARE[P]. 2012-04-19.
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