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专利名称: Implementation of Transmission and Control Platform for Equipment Front End Module of Semiconductor Production System
其他题名: 半导体制造设备前端模块的传输控制平台化实现方法
作者: Yu HB(于海斌); Xu AD(徐皑冬); Zhang JL(张吉龙); Liu MZ(刘明哲); Hu JT(胡静涛); Li Z(李正)
所属部门: 工业控制网络与系统研究室
专利权人: 中国科学院沈阳自动化研究所
专利国别: 美国
专利类型: 发明
专利状态: 有效
摘要: A method of platformization of an equipment front end module of a semiconductor production system includes the steps of: establishing a subsystem management module, a communication interface module, a parse module, and a network communication module directing the command by the communication interface module to the subsystem management module analyzing the command by the subsystem management module and sending the command to the corresponding subsystem module sending the command from the corresponding subsystem module to the controller of the equipment front end module through the network communication module and analyzing message by the parse module, sending a feedback to the corresponding subsystem module, and then sending the feedback to the control system of the semiconductor production system through the communication interface module. The present invention provides a standardized software interface to standardize different IC equipment control systems and to enhance the production efficiency of the system.
优先权数据: CN20101616602
是否PCT专利:
申请日期: 2011-03-28
公开日期: 2012-07-05
专利申请号: US201113072791
公布/公告号: US2012173011
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/12862
Appears in Collections:工业控制网络与系统研究室_专利

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Recommended Citation:
Yu HB,Xu AD,Zhang JL,et al. Implementation of Transmission and Control Platform for Equipment Front End Module of Semiconductor Production System. US2012173011. 2012.
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