SIA OpenIR  > 智能产线与系统研究室
IC装备真空反应腔冷却水道真空电子束焊接夹具
Alternative TitleVacuum electron beam welding fixture for cooling water channel of vacuum reaction cavity of integrate circuit (IC) equipment
乔红超; 赵吉宾; 于彦凤
Department装备制造技术研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype实用新型
Status避重放弃
Abstract本实用新型属于IC装备真空电子束焊接领域,具体地说是一种IC装备真空反应腔冷却水道真空电子束焊接夹具,包括XY轴二维平台、立卧动力头、转动卡盘及顶尖组件,其中XY轴二维平台安装在真空电子束焊机上,所述立卧动力头及转动卡盘通过安装座安装在XY轴二维平台的XY直线工作台上,转动卡盘安装在安装座上,并通过传动装置与立卧动力头的输出端相连接;夹持在转动卡盘上的被焊接工件具有随XY轴二维平台沿X轴、Y轴往复移动以及随转动卡盘旋转三个自由度。本实用新型具有结构简单、质量轻、使用方便、成本低等优点,在提高生产效率的同时,保证了焊接质量的均匀性和稳定性。
Other Abstract

The utility model belongs to the field of vacuum electron beam welding of integrate circuit (IC) equipment, and particularly relates to a vacuum electron beam welding fixture for a cooling water channel of a vacuum reaction cavity of integrate circuit (IC) equipment. The vacuum electron beam welding fixture comprises an XY-axis two-dimensional platform, a vertical and horizontal power head, a rotating chuck and a centre assembly, wherein the XY-axis two-dimensional platform is arranged on a vacuum electron beam welding machine the vertical and horizontal power head and the rotating chuck are arranged on an XY-axis linear workbench of the XY-axis two-dimensional platform by a mounting base the rotating chuck is arranged on the mounting base and is connected with the output end of the vertical and horizontal power head by a transmission device and a welded workpiece which is clamped on the rotating chuck has three degrees of freedom of doing reciprocating motion along an X axis and a Y axis with the XY-axis two-dimensional platform and rotating with the rotating chuck. The vacuum electron beam welding fixture has the advantages of simple structure, light mass, convenience for use, low cost and the like, and the uniformity and stability of welding quality are ensured while the production efficiency is improved.

PCT Attributes
Application Date2012-11-02
2013-04-24
Date Available2013-04-24
Application NumberCN201220574042.2
Open (Notice) NumberCN202894585U
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/13378
Collection智能产线与系统研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
乔红超,赵吉宾,于彦凤. IC装备真空反应腔冷却水道真空电子束焊接夹具[P]. 2013-04-24.
Files in This Item: Download All
File Name/Size DocType Version Access License
CN201220574042.2.pdf(621KB)专利 开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[乔红超]'s Articles
[赵吉宾]'s Articles
[于彦凤]'s Articles
Baidu academic
Similar articles in Baidu academic
[乔红超]'s Articles
[赵吉宾]'s Articles
[于彦凤]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[乔红超]'s Articles
[赵吉宾]'s Articles
[于彦凤]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: CN201220574042.2.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.