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Alternative TitleVacuum electron beam welding fixture for cooling water channel of vacuum reaction cavity of integrate circuit (IC) equipment
乔红超; 赵吉宾; 于彦凤
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other Abstract

The utility model belongs to the field of vacuum electron beam welding of integrate circuit (IC) equipment, and particularly relates to a vacuum electron beam welding fixture for a cooling water channel of a vacuum reaction cavity of integrate circuit (IC) equipment. The vacuum electron beam welding fixture comprises an XY-axis two-dimensional platform, a vertical and horizontal power head, a rotating chuck and a centre assembly, wherein the XY-axis two-dimensional platform is arranged on a vacuum electron beam welding machine the vertical and horizontal power head and the rotating chuck are arranged on an XY-axis linear workbench of the XY-axis two-dimensional platform by a mounting base the rotating chuck is arranged on the mounting base and is connected with the output end of the vertical and horizontal power head by a transmission device and a welded workpiece which is clamped on the rotating chuck has three degrees of freedom of doing reciprocating motion along an X axis and a Y axis with the XY-axis two-dimensional platform and rotating with the rotating chuck. The vacuum electron beam welding fixture has the advantages of simple structure, light mass, convenience for use, low cost and the like, and the uniformity and stability of welding quality are ensured while the production efficiency is improved.

PCT Attributes
Application Date2012-11-02
Date Available2013-04-24
Application NumberCN201220574042.2
Open (Notice) NumberCN202894585U
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
乔红超,赵吉宾,于彦凤. IC装备真空反应腔冷却水道真空电子束焊接夹具[P]. 2013-04-24.
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