SIA OpenIR  > 光电信息技术研究室
基于机器视觉的晶圆预定位装置及方法
Alternative TitleWafer pre-locating device based on machine vision and method thereof
吴清潇; 欧锦军; 朱枫; 郝颖明; 付双飞; 苗锡奎
Department光电信息技术研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status视为撤回
Abstract本发明涉及基于机器视觉的晶圆预定位装置及方法,其装置包括真空吸附式晶圆上料台、图像采集处理单元、大幅面红外面光源和二维微动平台系统。其方法包括以下步骤:晶圆上料;采集晶圆图像;边缘提取;晶圆圆心拟合;晶圆位置调整。本发明避免了对晶圆边缘的损伤;具有不作任何调整,能同时满足晶圆精确定位的优点;同时,该装置结构简单,成本较低,能满足IC装备制造中对晶圆预定位的需求。
Other AbstractThe invention relates to a wafer pre-locating device based on machine vision and a method thereof. The device comprises a vacuum-absorbing type wafer feeding table, an image collecting and processing unit, a large-format infrared face area light source and a two-dimension micro-motion platform system. The method comprises the steps of feeding wafers, collecting images of the wafers extracting edges fitting circle centers of the wafers and adjusting positions of the wafers. The device and the method avoid damage to the edges of the wafers, and have the advantages of being free of any adjustment and capable of meeting requirements for accurate location of the wafers. Meanwhile, the device is simple in structure, low in cost, and capable of meeting requirements of manufacture of IC equipment for pre-location of the wafers.
PCT Attributes
Application Date2012-01-19
2013-07-24
Application NumberCN201210017565.1
Open (Notice) NumberCN103219269A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/13538
Collection光电信息技术研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
吴清潇,欧锦军,朱枫,等. 基于机器视觉的晶圆预定位装置及方法[P]. 2013-07-24.
Files in This Item: Download All
File Name/Size DocType Version Access License
CN201210017565.1.pdf(402KB)专利 开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[吴清潇]'s Articles
[欧锦军]'s Articles
[朱枫]'s Articles
Baidu academic
Similar articles in Baidu academic
[吴清潇]'s Articles
[欧锦军]'s Articles
[朱枫]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[吴清潇]'s Articles
[欧锦军]'s Articles
[朱枫]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: CN201210017565.1.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.