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Alternative TitleStepping omnibearing nano moving platform
谈大龙; 朱涛; 张江波
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司
Other AbstractThe present invention relates to micro device assembling technology, and is especially a kind of stepped omnibearing nanometer moving platform for micro processing, biological cell operation, etc. The stepped omnibearing nanometer moving platform consists of upper platform and three piezoelectric drivers hinged elastically to the upper platform and arranged homogeneously in the periphery of the upper platform. Each of the piezoelectric drivers includes one driving unit, and two or more driving units are connected serially. Each driving unit consists of two piezoelectric ceramics, one cross beam and one contact element. Each of the piezoelectric ceramics is connected to the control circuit and is radio communicated with computer through communication circuit. The present invention can realize omnibearing planar nanometer motion in raised mechanism precision and flexibility.
PCT Attributes
Application Date2004-04-16
Date Available2008-05-14
Application NumberCN200410020407.7
Open (Notice) NumberCN1683233A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
谈大龙,朱涛,张江波. 步进式全方位纳米移动平台[P]. 2005-10-19.
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