SIA OpenIR  > 机器人学研究室
Alternative TitleSample nondestructive approach device facing to nano observation and operation
缪磊; 周磊; 董再励; 刘柱; 王越超
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司
Other AbstractThe utility model relates to a sample undamaged approach device for nanometer observation and operation, which includes an initial setting motion platform that is connected with one-dimensional motion platform via a stepping motor a precision motion platform that is formed by a PZT driver and positioned in the one-dimensional motion platform a feedback control unit, the probe which is above the sample is positioned on the laser path of rays and the generated laser rays to a photoelectric sensor a drive control that connects with the photoelectric sensor and that is communicated with the stepping motor and the PZT driver a photoelectric limit switch which is fixed on the pedestal lateral wall and on the one-way dimensional motion platform wherein, the drive control takes single chip as the core, and exchanges the information of system status and control parameter with an upper machine. Through the control sample, the probe receives the initial setting and nanometer precision motion. After checking reflection laser facula position variation signal control step, the feedback control is carried by photoelectric examination information generated by the atomic force when the tested sample approaches the probe thereby realizing the aim of the undamaged sample approach probe.
PCT Attributes
Application Date2006-12-22
Date Available2008-04-16
Application NumberCN200620168529.5
Open (Notice) NumberCN201047823Y
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
缪磊,周磊,董再励,等. 面向纳米观测与操作的样品无损逼近装置[P]. 2008-04-16.
Files in This Item: Download All
File Name/Size DocType Version Access License
CN200620168529.5.pdf(473KB)专利 开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[缪磊]'s Articles
[周磊]'s Articles
[董再励]'s Articles
Baidu academic
Similar articles in Baidu academic
[缪磊]'s Articles
[周磊]'s Articles
[董再励]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[缪磊]'s Articles
[周磊]'s Articles
[董再励]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: CN200620168529.5.pdf
Format: Adobe PDF
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.