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一种面向纳米观测与操作的样品无损逼近方法及实现装置
Alternative TitleSample nondestructive approach method and implementation device facing to nano collimation and operation
缪磊; 周磊; 董再励; 刘柱; 王越超
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司
Country中国
Subtype发明
Status未缴年费
Abstract本发明公开一种面向纳米观测与操作的样品无损逼近方法。它通过控制样品相对于探针进行微米级的初调运动及纳米级的精密运动,经检测反射激光光斑的位置变化信号的反馈控制步骤,通过检测样品逼近探针产生原子力作用时产生的光电检测信息进行反馈控制,达到控制样品无损逼近探针的目的。采用本发明可以避免碰撞逼近所造成的探针或样品损伤。
Other AbstractThe invention discloses a sample nondestructive approximation method regarding nanometer observation and operation. A sample is controlled to do nanometer level initial adjustment movement relative to a probe and to do nanometer level precise movement. After undergoing the feedback control step of checking position variation signal of a reflected laser spot, the aim of controlling the sample to approach the probe without damage is achieved through carrying out feedback control of checking the photoelectric detection signal produced when the sample approaches the probe and generates an atomic force action. The invention can avoid probe or sample damage caused by collision approximation.
description.patentprioritydataCN20061134977
PCT Attributes
Application Date2006-12-22
2008-06-25
Date Available2011-02-02
Application NumberCN200610134977.8
Open (Notice) NumberCN101206170A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/13636
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
缪磊,周磊,董再励,等. 一种面向纳米观测与操作的样品无损逼近方法及实现装置[P]. 2008-06-25.
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