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专利名称: 亚微牛顿级力测量装置
其他题名: Sub micro Newton grade force measuring apparatus
作者: 于鹏; 董再励; 缪磊; 刘连庆; 刘意杨; 王光宏
所属部门: 机器人学研究室
专利权人: 中国科学院沈阳自动化研究所
专利代理: 沈阳科苑专利商标代理有限公司
专利国别: 中国
专利类型: 实用新型
专利状态: 失效
摘要: 本实用新型涉及基于PVDF压电材料的微牛顿力测量技术。具体地说是亚微牛顿级力的测量装置,它由微力感知测量头,信号调理电路和数据采集模块构成,其中微力感知测量头接受来自探针的微作用力,将力信号变为电荷后送至信号调理电路,信号调理电路将其转换成合适大小并能检测的电压信号输出至数据采集模块,数据采集模块把获得的电压信号经过A/D转换后利用已标定好的微作用力与信号调理电路输出电压之间的关系,将所述电压值换算为微力数值。采用本实用新型解决了微装配过程中的亚微牛顿接触力测量问题,主要用于微纳米尺度加工、装配等技术领域。
英文摘要: The utility model relates to the micro Newton force measuring technique, based on the PVDF piezoelectric material, in particular to a measuring device for the sub-micro Newton grade force, comprising a micro-force sensing measuring head, a signal conditioning circuit and a data acquisition module wherein, the micro-force sensing measuring head receives the micro-force from a probe and converts the force signal into the electric charge which is transmitted to the signal conditioning circuit the electric charge is converted into voltage signal which can be detected and has proper size by the signal conditioning circuit and is outputted to the data acquisition module the data acquisition module applies A/D conversion on the obtained voltage signal and converts the voltage value into micro-force numerical value according to the relationship of the calibrated micro-force and the outputted voltage of the signal conditioning circuit. The measuring device for the sub-micro Newton grade force is adopted to solve the problem of measuring the sub-micro Newton contact force during the micro assembly process and is mainly applicable to the submicron scale machining and the assembly technical fields.
优先权数据: CN20072013927U
是否PCT专利:
申请日期: 2007-08-22
公开日期: 2008-08-06
授权日期: 2008-08-06
专利申请号: CN200720013927.4
公布/公告号: CN201096557Y
语种: 中文
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/13642
Appears in Collections:机器人学研究室_专利

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