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Alternative TitleSPM probe enhancement work method
刘志华; 杨永良; 董再励; 王越超
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司
Other AbstractThe invention relates to a technique for operating a nanometer-sized object in the nanometer science and technology and in particularly discloses an SPM probe reinforcing operating method. A start position and a termination positioned are determined according to control parameters and the number of probe operation points is calculated and operations of translation and rotation are realized, according to a single-step operation distance or rotation angle, an operation point distance and an operation direction, which are regulated in a translation operation programming method and a rotation operation programming method based on probe preprogramming. The adoption of the invention can overcome the defect that due to the small diameter of the probe, only point operation can be performed to an operated object, but effective control to a posture of the operated object is impossible. The invention also has the advantages of small step pitch, fast multi-point orientation, highly efficient operation and operated object posture control.
PCT Attributes
Application Date2007-10-26
Date Available2010-04-07
Application NumberCN200710157706.9
Open (Notice) NumberCN101419465A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
刘志华,杨永良,董再励,等. 一种SPM探针增强作业方法[P]. 2009-04-29.
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