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Alternative TitleCarbon nano tube-electrode structure and temperature sensor chip based on the same
董再励; 于海波; 王越超; 田孝军; 曲艳丽; 李文荣
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe utility model discloses a carbon nano tube-electrode structure and a temperature sensor chip based on the same. The structure comprises a substrate, a carbon nano tube and electrodes, wherein the electrodes are arranged on the substrate in pairs, and the carbon nano tube is electrically connected with a pair of electrodes. The carbon nano tube has good thermal conductivity, and the resistivity of the metallic carbon nano tube can be changed along with the change of temperature. By utilizing the property that the resistivity of the carbon nano tube is changed along with the temperature, the utility model provides a temperature sensor chip structure which can take the carbon nano tube-electrode as a temperature sensing unit and has low energy consumption and high sensitivity. The sensor chip integrates eight independent temperature sensing units within 2mm*2mm area. In the temperature sensor chip structure, a dielectrophoresis technology can be utilized to realize assembly on a microelectrode array to form the temperature sensing unit of the carbon nano tube-metal electrode and finally form a carbon nano tube temperature sensor.
PCT Attributes
Application Date2009-12-23
Date Available2010-11-24
Application NumberCN200920288330.X
Open (Notice) NumberCN201653962U
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
董再励,于海波,王越超,等. 一种碳纳米管-电极结构及基于该结构的温度传感器芯片[P]. 2010-11-24.
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