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基于碳纳米管-电极结构的温度传感器芯片
Alternative TitleCarbon nanotube-electrode structure-based temperature sensor chip
董再励; 于海波; 王越超; 田孝军; 曲艳丽; 李文荣
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status视为撤回
Abstract本发明公开一种基于碳纳米管-电极结构的温度传感器芯片,包括基底、碳纳米管、电极,所述电极成对设置在基底上,所述碳纳米管与所述的一对电极间电连接。碳纳米管具有良好的导热性,并且金属性碳纳米管的电阻率会随温度的变化而发生改变。利用碳纳米管电阻率随温度变化的性质,本专利提出了一种能够利用碳纳米管-电极作为温度传感单元的具有低能耗、高灵敏度的传感器芯片结构,该传感器芯片在2mm×2mm的区域内集成了8个独立温度传感单元。所述温度传感器芯片结构,可以利用介电泳技术实现碳纳米管在微电极阵列上的装配,形成碳纳米管-金属电极的温度传感单元,并最终形成碳纳米管温度传感器。
Other AbstractThe invention discloses a carbon nanotube-electrode structure-based temperature sensor chip. The temperature sensor chip comprises a base, carbon nanotubes and electrodes, wherein the electrodes are arranged on the base in pair the carbon nanotubes are electrically connected with the pair of electrodes and have high heat conductivity and the resistivity of the metal carbon nanotubes varies along with temperature variation. By using the characteristic that the resistivity of the carbon nanotubes varies along with the temperature variation, the invention provides an energy-efficient and high-flexibility sensor chip structure in which carbon nanotube-electrodes can be used as temperature sensing units and the sensor chip integrates eight independent temperature sensing units in a region of 2mm*2mm. In the temperature sensor chip structure, the assembly of the carbon nanotubes on a microelectrode array can be realized by an electrophoresis technology to form the temperature sensing units of the carbon nanotube-metal electrodes and finally form the carbon nanotube temperature sensor.
PCT Attributes
Application Date2009-12-23
2011-06-29
Date Available2013-10-15
Application NumberCN200910248670.4
Open (Notice) NumberCN102109386A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/13727
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
董再励,于海波,王越超,等. 基于碳纳米管-电极结构的温度传感器芯片[P]. 2011-06-29.
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