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Alternative TitleMethod for processing temperature sensor chip based on carbon nanotube-electrode structure
董再励; 于海波; 王越超; 田孝军; 曲艳丽; 李文荣
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention discloses a method for processing a temperature sensor chip based on a carbon nanotube-electrode structure. A carbon nanotube is assembled on an electrode by a dielectrophoresis technology 0.01 mass percent carbon nanotube solution is adopted in the dielectrophoresis technology (a solvent is acetone with the purity of over 99 percent), and is subjected to dispersion preprocessing by a probe ultrasonic machine and in the process of assembling the carbon nanotube by dielectrophoresis, the alternating voltage parameters of the adopted dielectrophoresis are that: the voltage amplitude is 10V, the frequency is 1MHz, and the waveform is square wave. The invention also discloses the processing steps of the electrode with the carbon nanotube-electrode structure. Eight independent temperature sensing units are integrated in a 2mm*2mm area of a temperature sensor core processed by the method, and the sensor chip has low energy consumption and high sensitivity.
PCT Attributes
Application Date2009-12-23
Date Available2013-10-15
Application NumberCN200910248695.4
Open (Notice) NumberCN102109387A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
董再励,于海波,王越超,等. 基于碳纳米管-电极结构的温度传感器芯片的加工方法[P]. 2011-06-29.
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