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专利名称: 基于碳纳米管-电极结构的温度传感器芯片的加工方法
其他题名: Method for processing temperature sensor chip based on carbon nanotube-electrode structure
作者: 董再励; 于海波; 王越超; 田孝军; 曲艳丽; 李文荣
所属部门: 机器人学研究室
专利权人: 中国科学院沈阳自动化研究所
专利代理: 沈阳科苑专利商标代理有限公司 21002
专利国别: 中国
专利类型: 发明
专利状态: 失效
摘要: 本发明公开一种基于碳纳米管-电极结构的温度传感器芯片的加工方法,利用介电泳技术实现碳纳米管在电极上装配,所述介电泳技术为采用质量百分比浓度为0.01%碳纳米管溶液(溶剂为纯度大于99%的丙酮),碳纳米管溶液首先利用探头式超声机进行分散预处理;在利用介电泳进行碳纳米管装配过程中,采用的介电泳的交变电压参数为:电压幅值为10V,频率为1MHz,波形为方波;并公开了所述碳纳米管-电极结构电极的加工步骤。按本发明方法加工的温度传感器芯在2mm×2mm的区域内集成了8个独立温度传感单元,具有低能耗、高灵敏度的传感器芯片结构。
英文摘要: The invention discloses a method for processing a temperature sensor chip based on a carbon nanotube-electrode structure. A carbon nanotube is assembled on an electrode by a dielectrophoresis technology 0.01 mass percent carbon nanotube solution is adopted in the dielectrophoresis technology (a solvent is acetone with the purity of over 99 percent), and is subjected to dispersion preprocessing by a probe ultrasonic machine and in the process of assembling the carbon nanotube by dielectrophoresis, the alternating voltage parameters of the adopted dielectrophoresis are that: the voltage amplitude is 10V, the frequency is 1MHz, and the waveform is square wave. The invention also discloses the processing steps of the electrode with the carbon nanotube-electrode structure. Eight independent temperature sensing units are integrated in a 2mm*2mm area of a temperature sensor core processed by the method, and the sensor chip has low energy consumption and high sensitivity.
是否PCT专利:
申请日期: 2009-12-23
公开日期: 2011-06-29
授权日期: 2013-10-15
专利申请号: CN200910248695.4
公布/公告号: CN102109387A
语种: 中文
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/13728
Appears in Collections:机器人学研究室_专利

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Recommended Citation:
董再励,于海波,王越超,等. 基于碳纳米管-电极结构的温度传感器芯片的加工方法. CN102109387A. 2011.
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