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基于AFM的纳米级电极加工方法
Alternative TitleNanoscale electrode processing method based on AFM (atomic force microscopy)
焦念东; 王志迁; 董再励
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status未缴年费
Abstract本发明公开一种基于AFM的纳米级电极加工方法,通过控制AFM探针与样本作用力、探针运动路径及速度对微米级电极进行切割加工,实现电极前端宽度100纳米以内的纳米级电极的加工,增加其在纳流控测试中的检测精度及灵敏度。本发明的纳米级电极加工方法可应用于纳流控芯片中对纳米沟道内流体特性及生物单分子进行高灵敏度检测分析。
Other AbstractThe invention discloses a nanoscale electrode processing method based on an AFM (atomic force microscopy). According to the method, a micrometer level electrode is cut and processed through the controlling on the action force of an AFM probe on a sample and the movement path and speed of the probe, thus the processing of the nanoscale electrode of which a front end has width within100 nanometers is realized, and the detection accuracy and flexibility in a nano fluidic test are increased. The nanoscale electrode processing method provided by the invention can be applied to high-flexibility detection and analysis of the fluid characteristics of fluid in a nano channel in the nano fluidic chip and biology monomolecules.
PCT Attributes
Application Date2010-04-02
2011-10-12
Date Available2014-02-12
Application NumberCN201010138122.9
Open (Notice) NumberCN102211755A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/13749
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
焦念东,王志迁,董再励. 基于AFM的纳米级电极加工方法[P]. 2011-10-12.
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