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Alternative TitleNanoscale electrode processing method based on AFM (atomic force microscopy)
焦念东; 王志迁; 董再励
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention discloses a nanoscale electrode processing method based on an AFM (atomic force microscopy). According to the method, a micrometer level electrode is cut and processed through the controlling on the action force of an AFM probe on a sample and the movement path and speed of the probe, thus the processing of the nanoscale electrode of which a front end has width within100 nanometers is realized, and the detection accuracy and flexibility in a nano fluidic test are increased. The nanoscale electrode processing method provided by the invention can be applied to high-flexibility detection and analysis of the fluid characteristics of fluid in a nano channel in the nano fluidic chip and biology monomolecules.
PCT Attributes
Application Date2010-04-02
Date Available2014-02-12
Application NumberCN201010138122.9
Open (Notice) NumberCN102211755A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
焦念东,王志迁,董再励. 基于AFM的纳米级电极加工方法[P]. 2011-10-12.
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