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题名: Research of Material Transfer Software Platform in IC Equipment Controlling System
作者: Wang YN(王亚楠) ; Liu MZ(刘明哲) ; Liu YF(刘元峰)
作者部门: 工业控制网络与系统研究室
会议名称: 2013 4th IEEE International Conference on Software Engineering and Service Science (ICSESS)
会议日期: May 23-25, 2013
会议地点: Beijing, China
会议录: 2013 4th IEEE International Conference on Software Engineering and Service Science (ICSESS)
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2013
页码: 239-242
收录类别: EI
ISSN号: 2327-0586
ISBN号: 978-1-4673-5000-6
关键词: semiconductor equipment control system ; material transfer ; versatility ; rapid development
摘要: This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve user's development efficiency, and has good application prospects.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/13882
Appears in Collections:工业控制网络与系统研究室_会议论文

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