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题名: A Current Assisted Deposition Method Based on Contact Mode Atomic Force Microscope
作者: Liu ZL(刘增磊) ; Jiao ND(焦念东) ; Wang ZD(王志东) ; Liu LQ(刘连庆)
作者部门: 机器人学研究室
会议名称: 2013 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems
会议日期: May 26-29, 2013
会议地点: Nanjing, China
会议录: Proceedings of the 2013 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems
会议录出版者: IEEE
会议录出版地: NEW YORK
出版日期: 2013
页码: 287-290
收录类别: EI
ISBN号: 978-1-4799-0610-9
关键词: AFM ; nano fabrication ; deposition ; field emission
摘要: This paper introduces a novel AFM deposition method. In contrast to traditional method, the method in this paper has two differences. Firstly in our method AFM works in contact mode. AFM tip presses on substrate slightly in contact mode and it does not need to control AFM tip-substrate separation precisely, which makes AFM deposition easy to carry out. Secondly current is applied to AFM tip to induce deposition instead of voltage. By applying current, uniform nanodots can be fabricated repeatedly. Furthermore, nanolines can be fabricated directly in a single action with the method. The method is potential to be used for soldering nanowires or fabricating nanostructures.
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/13892
Appears in Collections:机器人学研究室_会议论文

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