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题名: Active landmark configuration for accurate nano-positioning
作者: Yuan S(袁帅) ; Liu LQ(刘连庆) ; Wang ZD(王志东) ; Xi N(席宁) ; Wang YC(王越超) ; Dong ZL(董再励)
作者部门: 机器人学研究室
会议名称: 6th IFAC Symposium on Mechatronic Systems, MECH 2013
会议日期: April 10-12, 2013
会议地点: Hangzhou, China
会议录: 6th IFAC Symposium on Mechatronic Systems, MECH 2013
会议录出版者: IFAC Secretariat
会议录出版地: Laxenburg, Austria
出版日期: 2013
页码: 594-599
收录类别: EI
ISBN号: 978-3-902823-31-1
摘要: The spatial uncertainties of atom force microscopy (AFM) tip position hinder the AFM based nano-manipulation. Although the landmark based tip localization can be applied to improve the tip position accuracy in the task space, the PZT nonlinearity and system drift are still a challenge to compensation performance when the tip is positioned far from the landmark. Therefore this paper proposes an active landmark configuration. This method first estimates the nearby area called as the landmark domain around the target position, and then actively manipulates the landmark into the landmark domain by using virtual hand to improve the positioning accuracy. Simulation and experiment illustrate the validity of the proposed method.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/13899
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
袁帅;刘连庆;王志东;席宁;王越超;董再励.Active landmark configuration for accurate nano-positioning.见:IFAC Secretariat.6th IFAC Symposium on Mechatronic Systems, MECH 2013,Laxenburg, Austria,2013,594-599
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