The thread pool technology provides a sound solution for two problems: one is expenses of the thread’s creation and destruction，the other is resource insufficiency. It can effectively improve the system response speed and performance and has been widely used in industrial equipment control system. Firstly, in this paper, the author design and realize a dynamic thread pool with buffer mechanism under Win32 environment, this thread pool has some characteristics, such as flexible configuration, simple interface, response in time, universal performance, and so on. Secondly, through the test experimental certification, the application of this thread pool can improve the response speed of system and an effective solution to the problem resources exhausted. Finally the author apply it in a semiconductor manufacturing equipment front module control system, currently the equipment has been put into use and the system runs stably.