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面向半导体制造设备的数据采集实现方法
Alternative TitleData collection implementation method of semiconductor manufacturing equipment
刘明哲; 徐皑冬; 叶家发; 王亚楠
Department工业控制网络与系统研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status视为撤回
Abstract本发明涉及一种面向半导体制造设备的数据采集实现方法,步骤为:分别在客户和设备服务端建立Web服务,Web通信中使用代理类;基于安全套接层协议的客户安全认证;自定义SOAPHeader数据格式;建立设备信息数据库;使用委托代理的方式处理设备中各种事件异常;创建数据采集计划的状态机,实现数据采集计划的行为转换;使用COM组件,完成设备端与设备控制系统的连接。本发明为半导体制造提供了通用设备数据采集方法,提高了半导体生产制造中生产者与工厂设备之间的数据采集能力。
Other AbstractThe invention relates to a data collection implementation method of semiconductor manufacturing equipment. The data collection implementation method comprises the steps: respectively building a Web service at a client terminal and an equipment server terminal, enabling a proxy class to be used in Web communication, conducting client safety certification based on a security socket layer, defining a SOAPHeader data format, building an equipment information database, using an agent entrustment mode to process various abnormal events in the equipment, building a state machine of a data collection plan, achieving behavior conversion on the data collection plan, and using a COM assembly to complete connection between the equipment terminal and an equipment control system. According to the data collection implementation method, a general equipment data collection method is provided for semiconductor manufacturing, and the data collection capacity between a producer and the equipment in a plant in semiconductor production and manufacturing is improved.
PCT Attributes
Application Date2012-06-12
2014
Application NumberCN201210193136.X
Open (Notice) NumberCN103491059A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/14139
Collection工业控制网络与系统研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
刘明哲,徐皑冬,叶家发,等. 面向半导体制造设备的数据采集实现方法[P]. 2014-01-01.
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