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Alternative TitleGUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software
于海斌; 徐皑冬; 刘明哲; 李正; 王锴; 金妮; 张吉龙; 于海斌; 徐皑冬; 刘明哲; 李正; 王锴; 金妮; 张吉龙
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention relates to a GUI (Graphical User Interface) platformization realization method orienting to IC (Integrated Circuit) equipment control software. The GUI platformization realization method comprises the following steps of: developing corresponding IC equipment driving modules and drawing a GUI platform interface according to the characteristics of IC equipment of different manufacturers connecting a monitoring host and a controller of the IC equipment by using the IC equipment driving modules to form a communication network reading data in the controller by the IC equipment driving modules and mapping the data onto a general data layer of a GUI platform and performing display, control and exception handling on the data in real time by the GUI platform interface by using the data layer, thereby realizing the GUI platformization of the IC equipment control software. According to the invention, a cross-platform mechanism is realized, the cluster monitoring capacity of wafer manufacturing equipment is enhanced, the requirements of the user on flexibly configuring a human-computer interface of a corresponding control system can be met, the entire production process is ensured to be rapidly configured in a short time, and thus, the requirement for starting the production in advance is guaranteed.
description.patentprioritydata2010.10.15 CN 201010508022.0
PCT Attributes
Application Date2011-03-04
Date Available2014-01-15
Application NumberCN201110052825.4
Open (Notice) NumberCN102455910B
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
于海斌,徐皑冬,刘明哲,等. 面向IC装备控制软件的GUI平台化实现方法[P]. 2012-05-16.
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