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Alternative TitleTwo-dimensional position tracking and measuring device and measuring method thereof
朱思俊; 郭大忠; 邹媛媛; 柳连柱; 赵明扬; 许石哲
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention belongs to the field of measurement and in particular provides a two-dimensional position tracking and measuring device and a measuring method thereof. The device comprises an interferometer body, an interferometer mirror group, a deviation detection system, a follow-up system, a turning component and a target reflecting mirror, wherein the deviation detection system comprises a light splitting component and a facula position sensor. The method is characterized in that laser emitted by the interferometer body passes through the interferometer mirror group and the light splitting component in sequence and irradiates the target reflecting mirror after being turned by the turning component, the light reflected by the target reflecting mirror irradiates the light splitting component after being turned by the turning component, the light is split into two paths, and one path of light is reflected back to the interferometer body and the other path of light irradiates the facula position sensor and the facula position sensor detects offset, converts the detected offset into a displacement signal and then transmits the displacement signal to a servo motor and the servo motor drives the turning component to move to accurately track the target reflecting mirror. The device has the advantages of high measurement accuracy, simple structure and good portability and the measuring method is simple and has strong reliability.
PCT Attributes
Application Date2010-12-13
Date Available2014-03-12
Application NumberCN201010585777.0
Open (Notice) NumberCN102538663B
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
朱思俊,郭大忠,邹媛媛,等. 一种二维位置跟踪测量装置及其测量方法[P]. 2012-07-04.
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