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Alternative TitleSample nondestructive approach method and implementation device facing to nano collimation and operation
缪磊; 周磊; 董再励; 刘柱; 王越超
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention discloses a sample nondestructive approximation method regarding nanometer observation and operation. A sample is controlled to do nanometer level initial adjustment movement relative to a probe and to do nanometer level precise movement. After undergoing the feedback control step of checking position variation signal of a reflected laser spot, the aim of controlling the sample to approach the probe without damage is achieved through carrying out feedback control of checking the photoelectric detection signal produced when the sample approaches the probe and generates an atomic force action. The invention can avoid probe or sample damage caused by collision approximation.
PCT Attributes
Application Date2006-12-22
Date Available2011-02-02
Application NumberCN200610134977.8
Open (Notice) NumberCN101206170B
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
缪磊,周磊,董再励,等. 一种面向纳米观测与操作的样品无损逼近方法及实现装置[P]. 2008-06-25.
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