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Alternative TitleAtomic force microscope imaging method capable of realizing dynamic adjustable height, aberration and resolution
于鹏; 杨洋; 周磊; 刘柱; 董再励; 鲁鹏
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention relates to an atomic force microscope (AFM) imaging method capable of realizing a dynamic adjustable height and a dynamic adjustable aberration resolution. The method comprises the following steps that: a model of a relation between AFM scanning data and bitmap image data is established a sample surface predicted height H is introduced into the relation model and according to the established relation model and the predicted height H, the AFM scanning data are dynamically converted into aberration bitmaps with different aberration resolutions, so that sample morphology visual graphical display with the dynamic aberration resolutions is realized. According to the method provided in the invention, the established relation model is simple the calculated amount is small and the method is easy to realize moreover, on-line dynamic adjustment of height and aberration resolution of an image can be carried out.
PCT Attributes
Application Date2010-12-04
Date Available2013-04-17
Application NumberCN201010573960.9
Open (Notice) NumberCN102486478B
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
于鹏,杨洋,周磊,等. 高度色差分辨率动态可调的原子力扫描显微镜成像方法[P]. 2012-06-06.
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