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Overview of micro-force sensing methods
Ma CZ(马超哲); Du JS(杜劲松); Liu YY(刘意杨); Chu YK(褚云凯)
Department智能检测与装备研究室
Conference Name2013 International Conference on Mechatronics and Information Technology, ICMIT 2013
Conference DateOctober 19-20, 2013
Conference PlaceGuilin, China
Author of SourceKorea Maritime University; Inha University; Hong Kong Industrial Technology Research Centre
Source PublicationApplied Mechanics and Materials
PublisherTrans Tech Publications
Publication PlaceZurich-Durnten, Switzerland
2013
Pages25-31
Indexed ByEI ; CPCI(ISTP)
EI Accession number20140117159569
WOS IDWOS:000336871700006
Contribution Rank1
ISSN1660-9336
ISBN978-3-03785-941-4
KeywordInformation Technology Micromachining Processing
AbstractAt present, reliable micro-force sensing is one of the most important research for micromanipulation and micro-assembly. Six kinds of methods to detect micro-force are described in this paper. Analysis of the basic principle and detection accuracy of each sensing method, and applications in micro-assembly and micromanipulation are briefly introduced. The purpose of this paper is to be useful to provide some references for scholars engaging in the micro-force sensing, which in turn promotes automatic processing level of micro-assembly and micromanipulation to reliably manufacture micro devices of high quality.
Language英语
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/14564
Collection智能检测与装备研究室
Recommended Citation
GB/T 7714
Ma CZ,Du JS,Liu YY,et al. Overview of micro-force sensing methods[C]//Korea Maritime University; Inha University; Hong Kong Industrial Technology Research Centre. Zurich-Durnten, Switzerland:Trans Tech Publications,2013:25-31.
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