At present, reliable micro-force sensing is one of the most important research for micromanipulation and micro-assembly. Six kinds of methods to detect micro-force are described in this paper. Analysis of the basic principle and detection accuracy of each sensing method, and applications in micro-assembly and micromanipulation are briefly introduced. The purpose of this paper is to be useful to provide some references for scholars engaging in the micro-force sensing, which in turn promotes automatic processing level of micro-assembly and micromanipulation to reliably manufacture micro devices of high quality.
Ma CZ,Du JS,Liu YY,et al. Overview of micro-force sensing methods[C]//Korea Maritime University; Inha University; Hong Kong Industrial Technology Research Centre. Zurich-Durnten, Switzerland:Trans Tech Publications,2013:25-31.