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Alternative TitleAtomic force microscope deposition method for nano-lines
刘增磊; 焦念东; 刘志华; 王志东; 刘连庆
Source Publication科学通报
Contribution Rank1
Funding Organization国家自然科学基金(61106109,61304251);中国科学院-国家外国专家局创新团队国际合作伙伴计划资助
Keyword纳米操作 纳米沉积 原子力显微镜 电场加工
Other AbstractNano-devices have many potential applications. However, how to connect the nano-components is a problem during fabrication of nano-devices. This paper introduces a nano-line deposition method with atomic force microscope (AFM). This method is expected to be used as a nano-welding technique, which can improve the physical and electrical connections between the various components of nano-devices. With this method, nano-lines can be deposited continuously, rather than depositing a row of nano-dots to form a nano-line. The method comprises two features. One is current-induced deposition rather than voltage. Experiments show that current-induced method can fabricate more continuous and smoother nano-lines than voltage-induced method.The other is a simple tip-substrate distance control means. AFM deposition is based on field emission theory, so tip-substrate distance is an important factor for field emission. A simple tip-substrate distance control means is introduced in this paper, which makes the deposition process easier.
Document Type期刊论文
Corresponding Author焦念东; 刘连庆
3.Department of Advanced Robotics Chiba Institute of Technology
Recommended Citation
GB/T 7714
刘增磊,焦念东,刘志华,等. 基于AFM的纳米线沉积加工方法[J]. 科学通报,2013,58(S2):200-206.
APA 刘增磊,焦念东,刘志华,王志东,&刘连庆.(2013).基于AFM的纳米线沉积加工方法.科学通报,58(S2),200-206.
MLA 刘增磊,et al."基于AFM的纳米线沉积加工方法".科学通报 58.S2(2013):200-206.
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