SIA OpenIR  > 工业控制网络与系统研究室
Implementation of a customizable GUI software platform for IC equipment
Wang CX(王晨曦); Liu MZ(刘明哲); Xu AD(徐皑冬)
Department工业控制网络与系统研究室
Conference Name2014 International Conference on Measurement, Instrumentation and Automation
Conference DateApril 23-24, 2014
Conference PlaceShanghai, China
Source PublicationApplied Mechanics and Materials
PublisherTrans Tech Publications Ltd
Publication PlaceZurich-Durnten, Switzerland
2014
Pages1455-1458
Indexed ByEI
EI Accession number20142717908583
Contribution Rank1
ISSN1660-9336
ISBN978-3-03835-138-2
KeywordSemiconductor Device Manufacture Silicon Wafers
AbstractWith the development of semiconductor industry, different types of wafer processing are increasing. According to the different wafer processing models, the need of data display and process is different. In this paper, a customizable software platform is described for the manufacturing equipment of semiconductor integrated circuit (IC equipment). The C# control technology has been used to build the IC equipment customizable control system interface. The development method of customizable control technology based on C# can realize the control of the reuse and codes sharing, in order to improve programming efficiency, avoid the development of two times, cost saving and be easy to debug.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/15038
Collection工业控制网络与系统研究室
AffiliationShenyang institute of Automation Chinese Academy of Sciences, Shenyang, China
Recommended Citation
GB/T 7714
Wang CX,Liu MZ,Xu AD. Implementation of a customizable GUI software platform for IC equipment[C]. Zurich-Durnten, Switzerland:Trans Tech Publications Ltd,2014:1455-1458.
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