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题名: Implementation of a customizable GUI software platform for IC equipment
作者: Wang CX(王晨曦) ; Liu MZ(刘明哲) ; Xu AD(徐皑冬)
作者部门: 工业控制网络与系统研究室
会议名称: 2014 International Conference on Measurement, Instrumentation and Automation
会议日期: April 23-24, 2014
会议地点: Shanghai, China
会议录: Applied Mechanics and Materials
会议录出版者: Trans Tech Publications Ltd
会议录出版地: Zurich-Durnten, Switzerland
出版日期: 2014
页码: 1455-1458
收录类别: EI
ISSN号: 1660-9336
ISBN号: 9783038351382
关键词: Semiconductor device manufacture ; Silicon wafers
摘要: With the development of semiconductor industry, different types of wafer processing are increasing. According to the different wafer processing models, the need of data display and process is different. In this paper, a customizable software platform is described for the manufacturing equipment of semiconductor integrated circuit (IC equipment). The C# control technology has been used to build the IC equipment customizable control system interface. The development method of customizable control technology based on C# can realize the control of the reuse and codes sharing, in order to improve programming efficiency, avoid the development of two times, cost saving and be easy to debug.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/15038
Appears in Collections:工业控制网络与系统研究室_会议论文

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Recommended Citation:
王晨曦; 刘明哲; 徐皑冬.Implementation of a customizable GUI software platform for IC equipment.见:Trans Tech Publications Ltd.Applied Mechanics and Materials,Zurich-Durnten, Switzerland,2014,1455-1458
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文件名: Implementation of a customizable GUI software platform for IC equipment.pdf
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