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题名: Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films
作者: Wang FF(王飞飞) ; Yu HB(于海波) ; Liang WF(梁文峰) ; Liu LQ(刘连庆) ; Mai, John D. ; Lee, Gwo-Bin ; Li WR(李文荣)
作者部门: 机器人学研究室
关键词: Electrohydrodynamic instability ; Optically induced electrokinetics ; Thin-film patterning ; Micro-pillars
刊名: MICROFLUIDICS AND NANOFLUIDICS
ISSN号: 1613-4982
出版日期: 2014
卷号: 16, 期号:6, 页码:1097-1106
收录类别: SCI ; CPCI(ISTP) ; EI
产权排序: 1
摘要: Projected light patterns are used to induce electrohydrodynamic instabilities in a polymer thin film sandwiched between two electrodes. Using this optically induced electrohydrodynamic instability (OEHI) phenomenon, we have successfully demonstrated rapid, microscale patterning of polydimethylsiloxane (PDMS) pillar arrays on a thin-film hydrogenated amorphous silicon layer on top of an indium titanium oxide glass substrate. This glass substrate is the bottom electrode in a two-electrode, parallel-plate capacitor configuration with a micron-scale gap. Within this gap are a thin film of spin-coated PDMS and a thin layer of air. Primary pillar growth is first observed within 5-90 s in the dark regions of the projected patterns and pillar growth eventually spreads to the illuminated regions when the initial PDMS thickness is <2 mu m. Experimental data characterizing the change in pillar diameters (between 15 and 30 mu m in diameter) show that they can be decoupled from the inter-pillar spacing (maintaining a constant similar to 84 mu m pitch between pillar centers) by controlling the applied DC voltage (between 110 and 210 V). Experimental results also show the importance of the optically induced lateral electric field on controlling pillar formation. This OEHI method of rapid pillar generation, with voltage control of the pillar diameter and control of pillar position via projected light patterns, presents new opportunities for low cost, efficient, and simple fabrication of micro, and perhaps nanoscale, polymer structures that could be used in many bioMEMS applications.
WOS记录号: WOS:000338835000011
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas
关键词[WOS]: FIELD-INDUCED INSTABILITIES ; ELECTRIC-FIELD ; POLYMER-FILMS ; PILLAR ARRAYS ; LIQUID-FILMS ; LITHOGRAPHY ; LIMITATIONS ; INTERFACE
研究领域[WOS]: Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
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内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/15123
Appears in Collections:机器人学研究室_期刊论文

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