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Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films
Wang FF(王飞飞); Yu HB(于海波); Liang WF(梁文峰); Liu LQ(刘连庆); Mai, John D.; Lee, Gwo-Bin; Li WJ(李文荣)
作者部门机器人学研究室
关键词Electrohydrodynamic Instability Optically Induced Electrokinetics Thin-film Patterning Micro-pillars
发表期刊MICROFLUIDICS AND NANOFLUIDICS
ISSN1613-4982
2014
卷号16期号:6页码:1097-1106
收录类别SCI ; EI ; CPCI(ISTP)
EI收录号20143117997824
WOS记录号WOS:000338835000011
产权排序1
摘要Projected light patterns are used to induce electrohydrodynamic instabilities in a polymer thin film sandwiched between two electrodes. Using this optically induced electrohydrodynamic instability (OEHI) phenomenon, we have successfully demonstrated rapid, microscale patterning of polydimethylsiloxane (PDMS) pillar arrays on a thin-film hydrogenated amorphous silicon layer on top of an indium titanium oxide glass substrate. This glass substrate is the bottom electrode in a two-electrode, parallel-plate capacitor configuration with a micron-scale gap. Within this gap are a thin film of spin-coated PDMS and a thin layer of air. Primary pillar growth is first observed within 5-90 s in the dark regions of the projected patterns and pillar growth eventually spreads to the illuminated regions when the initial PDMS thickness is <2 mu m. Experimental data characterizing the change in pillar diameters (between 15 and 30 mu m in diameter) show that they can be decoupled from the inter-pillar spacing (maintaining a constant similar to 84 mu m pitch between pillar centers) by controlling the applied DC voltage (between 110 and 210 V). Experimental results also show the importance of the optically induced lateral electric field on controlling pillar formation. This OEHI method of rapid pillar generation, with voltage control of the pillar diameter and control of pillar position via projected light patterns, presents new opportunities for low cost, efficient, and simple fabrication of micro, and perhaps nanoscale, polymer structures that could be used in many bioMEMS applications.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas
关键词[WOS]FIELD-INDUCED INSTABILITIES ; ELECTRIC-FIELD ; POLYMER-FILMS ; PILLAR ARRAYS ; LIQUID-FILMS ; LITHOGRAPHY ; LIMITATIONS ; INTERFACE
WOS研究方向Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
引用统计
被引频次:3[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/15123
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, Hong Kong
4.Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
推荐引用方式
GB/T 7714
Wang FF,Yu HB,Liang WF,et al. Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films[J]. MICROFLUIDICS AND NANOFLUIDICS,2014,16(6):1097-1106.
APA Wang FF.,Yu HB.,Liang WF.,Liu LQ.,Mai, John D..,...&Li WJ.(2014).Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films.MICROFLUIDICS AND NANOFLUIDICS,16(6),1097-1106.
MLA Wang FF,et al."Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films".MICROFLUIDICS AND NANOFLUIDICS 16.6(2014):1097-1106.
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