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Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films
Wang FF(王飞飞); Yu HB(于海波); Liang WF(梁文峰); Liu LQ(刘连庆); Mai, John D.; Lee, Gwo-Bin; Li WJ(李文荣)
Department机器人学研究室
Source PublicationMICROFLUIDICS AND NANOFLUIDICS
ISSN1613-4982
2014
Volume16Issue:6Pages:1097-1106
Indexed BySCI ; EI ; CPCI(ISTP)
EI Accession number20143117997824
WOS IDWOS:000338835000011
Contribution Rank1
KeywordElectrohydrodynamic Instability Optically Induced Electrokinetics Thin-film Patterning Micro-pillars
AbstractProjected light patterns are used to induce electrohydrodynamic instabilities in a polymer thin film sandwiched between two electrodes. Using this optically induced electrohydrodynamic instability (OEHI) phenomenon, we have successfully demonstrated rapid, microscale patterning of polydimethylsiloxane (PDMS) pillar arrays on a thin-film hydrogenated amorphous silicon layer on top of an indium titanium oxide glass substrate. This glass substrate is the bottom electrode in a two-electrode, parallel-plate capacitor configuration with a micron-scale gap. Within this gap are a thin film of spin-coated PDMS and a thin layer of air. Primary pillar growth is first observed within 5-90 s in the dark regions of the projected patterns and pillar growth eventually spreads to the illuminated regions when the initial PDMS thickness is <2 mu m. Experimental data characterizing the change in pillar diameters (between 15 and 30 mu m in diameter) show that they can be decoupled from the inter-pillar spacing (maintaining a constant similar to 84 mu m pitch between pillar centers) by controlling the applied DC voltage (between 110 and 210 V). Experimental results also show the importance of the optically induced lateral electric field on controlling pillar formation. This OEHI method of rapid pillar generation, with voltage control of the pillar diameter and control of pillar position via projected light patterns, presents new opportunities for low cost, efficient, and simple fabrication of micro, and perhaps nanoscale, polymer structures that could be used in many bioMEMS applications.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectNanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Fluids & Plasmas
WOS KeywordFIELD-INDUCED INSTABILITIES ; ELECTRIC-FIELD ; POLYMER-FILMS ; PILLAR ARRAYS ; LIQUID-FILMS ; LITHOGRAPHY ; LIMITATIONS ; INTERFACE
WOS Research AreaScience & Technology - Other Topics ; Instruments & Instrumentation ; Physics
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/15123
Collection机器人学研究室
Corresponding AuthorLi WJ(李文荣)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, Hong Kong
4.Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
Recommended Citation
GB/T 7714
Wang FF,Yu HB,Liang WF,et al. Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films[J]. MICROFLUIDICS AND NANOFLUIDICS,2014,16(6):1097-1106.
APA Wang FF.,Yu HB.,Liang WF.,Liu LQ.,Mai, John D..,...&Li WJ.(2014).Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films.MICROFLUIDICS AND NANOFLUIDICS,16(6),1097-1106.
MLA Wang FF,et al."Optically induced electrohydrodynamic instability-based micro-patterning of fluidic thin films".MICROFLUIDICS AND NANOFLUIDICS 16.6(2014):1097-1106.
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