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题名: Research on PVDF micro-force sensor
作者: Ma CZ(马超哲) ; Du JS(杜劲松) ; Liu YY(刘意杨)
作者部门: 智能检测与装备研究室
会议名称: 4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014
会议日期: June 19-20, 2014
会议地点: Guilin, China
会议主办者: Academy Publisher; CEIS; et al; INDERSCIENCE Publishers; TMS; Trans Tech publications inc.
会议录: Applied Mechanics and Materials
会议录出版者: Trans Tech Publications Ltd
会议录出版地: Zurich-Durnten, Switzerland
出版日期: 2014
页码: 1135-1138
收录类别: EI
ISSN号: 1660-9336
ISBN号: 9783038351924
关键词: Manufacture ; Micromachining ; Piezoelectricity ; Signal processing
摘要: At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor's output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution. © (2014) Trans Tech Publications, Switzerland.
语种: 英语
产权排序: 1
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/15136
Appears in Collections:智能检测与装备研究室_会议论文

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Recommended Citation:
马超哲; 杜劲松; 刘意杨.Research on PVDF micro-force sensor.见:Trans Tech Publications Ltd.Applied Mechanics and Materials,Zurich-Durnten, Switzerland,2014,1135-1138
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文件名: Research on PVDF Micro-Force Sensor.pdf
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