中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 智能检测与装备研究室  > 会议论文
题名:
Research on PVDF micro-force sensor
作者: Ma CZ(马超哲); Du JS(杜劲松); Liu YY(刘意杨)
作者部门: 智能检测与装备研究室
会议名称: 4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014
会议日期: June 19-20, 2014
会议地点: Guilin, China
会议主办者: Academy Publisher; CEIS; et al; INDERSCIENCE Publishers; TMS; Trans Tech publications inc.
会议录: Applied Mechanics and Materials
会议录出版者: Trans Tech Publications Ltd
会议录出版地: Zurich-Durnten, Switzerland
出版日期: 2014
页码: 1135-1138
收录类别: EI
EI收录号: 20143618135735
产权排序: 1
ISSN号: 1660-9336
ISBN号: 978-3-03835-192-4
关键词: Manufacture ; Micromachining ; Piezoelectricity ; Signal processing
摘要: At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor's output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution. © (2014) Trans Tech Publications, Switzerland.
语种: 英语
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/15136
Appears in Collections:智能检测与装备研究室_会议论文

Files in This Item: Download All
File Name/ File Size Content Type Version Access License
Research on PVDF Micro-Force Sensor.pdf(276KB)会议论文--开放获取View Download

作者单位: 1.Key Laboratory of Liaoning Province on Radar System and Application, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Ma CZ,Du JS,Liu YY. Research on PVDF micro-force sensor[C]. 4th International Conference on Frontiers of Manufacturing Science and Measuring Technology, ICFMM 2014. Guilin, China. June 19-20, 2014.Research on PVDF micro-force sensor.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Ma CZ(马超哲)]'s Articles
[Du JS(杜劲松)]'s Articles
[Liu YY(刘意杨)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Ma CZ(马超哲)]‘s Articles
[Du JS(杜劲松)]‘s Articles
[Liu YY(刘意杨)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Research on PVDF Micro-Force Sensor.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2018  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace