SIA OpenIR  > 工业控制网络与系统研究室
Research and development of a multiple data source curve drawing software for IC equipment
Jin N(金妮); Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴); Wang CX(王晨曦)
Department工业控制网络与系统研究室
Conference Name2014 International Conference on Manufacturing and Engineering Technology (ICMET)
Conference DateOctober 17-19, 2014
Conference PlaceSanya, China
Source PublicationManufacturing and Engineering Technology
PublisherTaylor & Francis Group
Publication PlaceLondon
2014
Pages209-212
Indexed ByEI ; CPCI(ISTP)
EI Accession number20160801990399
WOS IDWOS:000380507800043
Contribution Rank1
ISBN978-1-138-02645-2
KeywordIc Equipment Control System C# Language
AbstractIt is essential that IC equipment control software can get more intuitive information from the production data during wafer manufacturing. Currently, data are provided to users in a report form in most IC control systems that are not intuitive and cannot reflect the data trend of a long-term change. However, only a few IC equipment control systems can provide curve display function, which is still incomplete and inflexibility, and it is difficult to implement flexible configuration according to the user requirements. Therefore, C# control technology and XML approaches were studied, a flexible and multiple data source curve drawing software for IC equipment are introduced in this paper. This software supports multiple data source data source data acquisition and conversion, it can set curve parameters dynamically. In addition, it is easy to share the resource, operate, maintain and upgrade the software.
Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/15360
Collection工业控制网络与系统研究室
AffiliationShenyang Institute of Automation, Chinese Academy of Sciences, China
Recommended Citation
GB/T 7714
Jin N,Xu AD,Liu MZ,et al. Research and development of a multiple data source curve drawing software for IC equipment[C]. London:Taylor & Francis Group,2014:209-212.
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