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Research and development of a multiple data source curve drawing software for IC equipment
Jin N(金妮); Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴); Wang CX(王晨曦)
作者部门工业控制网络与系统研究室
会议名称2014 International Conference on Manufacturing and Engineering Technology (ICMET)
会议日期October 17-19, 2014
会议地点Sanya, China
会议录名称Manufacturing and Engineering Technology
出版者Taylor & Francis Group
出版地London
2014
页码209-212
收录类别EI ; CPCI(ISTP)
EI收录号20160801990399
WOS记录号WOS:000380507800043
产权排序1
ISBN号978-1-138-02645-2
关键词Ic Equipment Control System C# Language
摘要It is essential that IC equipment control software can get more intuitive information from the production data during wafer manufacturing. Currently, data are provided to users in a report form in most IC control systems that are not intuitive and cannot reflect the data trend of a long-term change. However, only a few IC equipment control systems can provide curve display function, which is still incomplete and inflexibility, and it is difficult to implement flexible configuration according to the user requirements. Therefore, C# control technology and XML approaches were studied, a flexible and multiple data source curve drawing software for IC equipment are introduced in this paper. This software supports multiple data source data source data acquisition and conversion, it can set curve parameters dynamically. In addition, it is easy to share the resource, operate, maintain and upgrade the software.
语种英语
引用统计
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/15360
专题工业控制网络与系统研究室
作者单位Shenyang Institute of Automation, Chinese Academy of Sciences, China
推荐引用方式
GB/T 7714
Jin N,Xu AD,Liu MZ,et al. Research and development of a multiple data source curve drawing software for IC equipment[C]. London:Taylor & Francis Group,2014:209-212.
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