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题名: Research and development of a multiple data source curve drawing software for IC equipment
作者: Jin N(金妮); Xu AD(徐皑冬); Liu MZ(刘明哲); Wang K(王锴); Wang CX(王晨曦)
作者部门: 工业控制网络与系统研究室
会议名称: 2014 International Conference on Manufacturing and Engineering Technology (ICMET)
会议日期: October 17-19, 2014
会议地点: Sanya, China
会议录: Manufacturing and Engineering Technology
会议录出版者: Taylor & Francis Group
会议录出版地: London
出版日期: 2014
页码: 209-212
收录类别: EI ; CPCI(ISTP)
ISBN号: 9781138026452
关键词: IC equipment ; control system ; C# language
摘要: It is essential that IC equipment control software can get more intuitive information from the production data during wafer manufacturing. Currently, data are provided to users in a report form in most IC control systems that are not intuitive and cannot reflect the data trend of a long-term change. However, only a few IC equipment control systems can provide curve display function, which is still incomplete and inflexibility, and it is difficult to implement flexible configuration according to the user requirements. Therefore, C# control technology and XML approaches were studied, a flexible and multiple data source curve drawing software for IC equipment are introduced in this paper. This software supports multiple data source data source data acquisition and conversion, it can set curve parameters dynamically. In addition, it is easy to share the resource, operate, maintain and upgrade the software.
语种: 英语
产权排序: 1
WOS记录号: WOS:000380507800043
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/15360
Appears in Collections:工业控制网络与系统研究室_会议论文

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Recommended Citation:
Jin N,Xu AD,Liu MZ,et al. Research and development of a multiple data source curve drawing software for IC equipment[C]. 见:2014 International Conference on Manufacturing and Engineering Technology (ICMET). Sanya, China. October 17-19, 2014.
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