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Alternative TitleFeedforward hysteresis calibration of piezoelectric actuator in AFM based on inverse model identification
王栋; 于鹏; 周磊; 刘柱; 杨洋; 董再励; 刘连庆
Conference Name11th World Congress on Intelligent Control and Automation (WCICA 2014)
Conference DateJune 29 - July 4, 2014
Conference PlaceShenyang, China
Source PublicationProceeding of the 11th World Congress on Intelligent Control and Automation
Publication PlacePiscataway, NJ, USA
Indexed ByEI ; CPCI(ISTP)
EI Accession number20152600976941
WOS IDWOS:000393066201101
Contribution Rank1
Keyword直接辨识逆模型 原子力显微镜 原子力显微镜 压电陶瓷 迟滞性校正
Abstract原子力显微镜(AFM)可以在纳米尺度进行观测和操作,在科学技术领域得到了广泛应用。压电陶瓷具有极高分辨率和快速响应速度,因此常用作AFM的驱动器。但压电陶瓷自身固有的迟滞非线性是影响AFM观测和操作精度的不利因素。针对AFM中压电陶瓷驱动器迟滞性问题,本文提出了一种改进的基于Prandtl-Ishlinskii (PI)模型的前馈校正方法。改进方法通过直接辨识逆模型参数,从原理上简化了PI逆模型的获取方式,消除了逆模型求取的局限性,并减小了计算量。实验证明本方法有效减小了由于迟滞性带来的误差。提高了AFM扫描成像质量。
Other AbstractAtomic force microscopy (AFM) has been widely applied in the field of science and technology because it can observe and manipulate at the nanometer scale. The piezoelectric is a regular choice for the actuator of AFM because of its high resolution and fast response. However, the intrinsic hysteresis nonlinearity weakens the accuracy of the observation and manipulation of AFM. Aiming at the hysteresis problem of the piezoelectric actuators in AFM, a modified feedforward calibration method based on the Prandtl-Ishlinskii (PI) model was proposed. By the means of identify the parameters of inverse model directly, the modified method simplify the obtaining procedure for the PI inverse model. The restriction to obtain the inverse model was removed, and the computational complexity was decreased. Experiments validate that the method is effective in reducing errors due to hysteresis, and improving AFM image quality.
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Corresponding Author王栋
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
王栋,于鹏,周磊,等. 基于辨识逆模型的AFM压电驱动器迟滞性前馈校正[C]. Piscataway, NJ, USA:IEEE,2014:1561-1566.
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