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Unified Hysteresis and Creep Compensation in AFM Tip Positioning with an Extended PI Model
Wang ZY(王智宇); Liu LQ(刘连庆); Wang ZD(王志东); Wang WX(王文学)
作者部门机器人学研究室
会议名称2014 IEEE International Conference on Robotics and Automation (ICRA 2014)
会议日期May 31 - June 7, 2014
会议地点HongKong, China
会议录名称2014 IEEE International Conference on Robotics and Automation (ICRA 2014)
出版者IEEE
出版地Piscataway, NJ, USA
2014
页码1606-1611
收录类别EI ; CPCI(ISTP)
EI收录号20152000853834
WOS记录号WOS:000377221101092
产权排序1
ISBN号978-1-4799-3685-4
关键词Hysteresis Creep Prandtl-ishlinskii Model Afm Pizeoelectric
摘要The nonlinearities such as hysteresis and creep are the major factors inherent in PZT actuation that affect the tip positioning precision and manipulation performance of the AFM system. In this study, an extended PI model is generalized by introducing a creep model to the basic hysteretic operator of the PI model at the inflexion point of the hysteresis loop. Unified compensation for hysteresis and creep can be implemented with the extended PI model. Experiment results demonstrate the validity and effectiveness of the extended PI model and it is implied that the inflexion creep compensation not only improves the tip positioning precision at the inflexion points on the hysteresis loops, but also the localization effectiveness during the whole process of PZT actuation.
语种英语
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/15392
专题机器人学研究室
通讯作者Liu LQ(刘连庆); Wang WX(王文学)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), China
2.College of Electrical and Control Engineering, Liaoning Technical University, University of Chinese Academy of Sciences, China
3.Dept. of Advanced Robotics, Chiba Institute of Technology, Japan
推荐引用方式
GB/T 7714
Wang ZY,Liu LQ,Wang ZD,et al. Unified Hysteresis and Creep Compensation in AFM Tip Positioning with an Extended PI Model[C]. Piscataway, NJ, USA:IEEE,2014:1606-1611.
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