Photoresist pump is an important part of coater and developer equipment, high precision control for the amount of photoresist is of great significance to improve the quality of coating and reduce the cost of production. Firstly, photoresist pump control system based on CAN bus is designed which master control chip uses ARM Cortex M3 in this article, and the composition and working principle of the photoresist pump control system are introduced. Secondly, the photoresist pump controller software based on embedded real-time operating system platform is designed and developed, and the control process and method are presented. Finally, the photoresist pump test is designed and completed, and the experimental results show that photoresist pump controller is designed and developed by high control accuracy, good stability, and flexible control method. Currently, the controller has been applied in practical engineering, and the system runs stably.