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专利名称: 一种多腔室晶圆加工设备传输控制系统
其他题名: Conveying control system for multi-cavity wafer machining equipment
作者: 刘明哲; 徐皑冬; 王亚楠; 金妮; 王晨曦; 刘元锋
所属部门: 工业控制网络与系统研究室
专利权人: 中国科学院沈阳自动化研究所
专利代理: 沈阳科苑专利商标代理有限公司 21002
专利国别: 中国
专利类型: 发明
专利状态: 公开
摘要: 本发明涉及一种多腔室晶圆加工设备传输控制系统,包括系统初始化模块、通信模块、传输任务处理模块、调度模块、执行模块、物料跟踪模块、错误与异常处理模块。本发明所提供的多腔室晶圆加工设备传输控制系统一方面实现了多腔室加工设备中晶圆传输控制的自动化过程,另一方面系统的各功能模块设计充分考虑到半导体装备制造过程中对物料传输过程的共性需求,且为传输设备和控制系统提供相应软件接口,对多腔室晶圆加工设备传输控制方法具有普遍的参考意义和二次开发价值。
英文摘要: The invention relates to a conveying control system for multi-cavity wafer machining equipment. The conveying control system comprises a system initialization module, a communication module, a conveying task processing module, a scheduling module, an execution module, a material tracking module and an error and abnormity processing module. According to the conveying control system for the multi-cavity wafer machining equipment, on one hand, the automation process of wafer conveying control in the multi-cavity machining equipment is realized, and on the other hand, the common requirement for the material conveying process in the semiconductor equipment manufacturing process is fully considered in the design of all the function modules of the system; moreover, corresponding software interfaces are provided for conveying equipment and the control system, and common referential meaning and secondary development value are provided for a conveying control method for the multi-cavity wafer machining equipment.
是否PCT专利:
申请日期: 2013-07-02
公开日期: 2015-01-14
专利申请号: CN201310274948.1
公布/公告号: CN104281095A
语种: 中文
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/15517
Appears in Collections:工业控制网络与系统研究室_专利

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