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Alternative TitleConveying control system for multi-cavity wafer machining equipment
刘明哲; 徐皑冬; 王亚楠; 金妮; 王晨曦; 刘元锋
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention relates to a conveying control system for multi-cavity wafer machining equipment. The conveying control system comprises a system initialization module, a communication module, a conveying task processing module, a scheduling module, an execution module, a material tracking module and an error and abnormity processing module. According to the conveying control system for the multi-cavity wafer machining equipment, on one hand, the automation process of wafer conveying control in the multi-cavity machining equipment is realized, and on the other hand, the common requirement for the material conveying process in the semiconductor equipment manufacturing process is fully considered in the design of all the function modules of the system; moreover, corresponding software interfaces are provided for conveying equipment and the control system, and common referential meaning and secondary development value are provided for a conveying control method for the multi-cavity wafer machining equipment.
PCT Attributes
Application Date2013-07-02
Application NumberCN201310274948.1
Open (Notice) NumberCN104281095A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
刘明哲,徐皑冬,王亚楠,等. 一种多腔室晶圆加工设备传输控制系统[P]. 2015-01-14.
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