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一种用于原子力显微镜的扫描探针夹持装置
Alternative TitleScanning probe clamping device for atomic force microscope
于鹏; 刘柱; 周磊; 杨洋; 王栋; 刘连庆; 焦念东
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype实用新型
Status避重放弃
Abstract本实用新型涉及一种用于原子力显微镜的扫描探针夹持装置,包括固定夹具、探针夹连接器、探针夹;所述探针夹连接器固定于固定夹具上,并与探针夹连接。本实用新型探针夹体积小、质量轻,能够固定到压电陶瓷驱动器上,可以应用于倒置式原子力显微镜扫描头的结构设计中;能够实现探针夹的快速装卸、探针的快速安装和固定,以及为探针提供纳米级位移的振动。
Other AbstractThe utility model relates to a scanning probe clamping device for atomic force microscope; the device comprises a fixed clamp, a probe clamping connector, and a probe clamp; the probe clamping connector is fixed to the fixed clamp and is connected to the probe clamp. The device of the utility model is small in size and light in weight; it can be secured to a piezoelectric ceramic driver and can be applied to a reversed-type atomic force microscope scanning head. The clamping device is able to realize the fast detachment of a probe clamp, the fast mounting and fixing of a probe and the vibration of Nano grade provided to the probe.
PCT Attributes
Application Date2014-05-20
2014-09-10
Date Available2014-09-10
Application NumberCN201420259994.4
Open (Notice) NumberCN203825035U
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/15601
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
于鹏,刘柱,周磊,等. 一种用于原子力显微镜的扫描探针夹持装置[P]. 2014-09-10.
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